A comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra shallow junctions

Dirch Hjorth Petersen; Rong Lin; Torben Mikael Hansen; E. Rosseel; W. Vandervorst; C. Markvardsen; Daniel Kjær; Peter Folmer Nielsen

A comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra shallow junctions

Dirch Hjorth Petersen, Rong Lin, Torben Mikael Hansen, E. Rosseel, W. Vandervorst, C. Markvardsen, Daniel Kjær, Peter Folmer Nielsen

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

Original language	English
Publication date	2007
Publication status	Published - 2007
Event	AVS INSIGHT-2007 Workshop - Napa, Canada Duration: 6 May 2007 → 9 May 2007

Workshop

Workshop	AVS INSIGHT-2007 Workshop
Country/Territory	Canada
City	Napa
Period	06/05/2007 → 09/05/2007

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@conference{6a318ca2a5fc42dba66c78c84047eb92,

title = "A comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra shallow junctions",

author = "Petersen, \{Dirch Hjorth\} and Rong Lin and Hansen, \{Torben Mikael\} and E. Rosseel and W. Vandervorst and C. Markvardsen and Daniel Kj{\ae}r and Nielsen, \{Peter Folmer\}",

year = "2007",

language = "English",

note = "AVS INSIGHT-2007 Workshop ; Conference date: 06-05-2007 Through 09-05-2007",

}

TY - ABST

T1 - A comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra shallow junctions

AU - Petersen, Dirch Hjorth

AU - Lin, Rong

AU - Hansen, Torben Mikael

AU - Rosseel, E.

AU - Vandervorst, W.

AU - Markvardsen, C.

AU - Kjær, Daniel

AU - Nielsen, Peter Folmer

PY - 2007

Y1 - 2007

M3 - Conference abstract for conference

T2 - AVS INSIGHT-2007 Workshop

Y2 - 6 May 2007 through 9 May 2007

ER -