A comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra shallow junctions

Dirch Hjorth Petersen, Rong Lin, Torben Mikael Hansen, E. Rosseel, W. Vandervorst, C. Markvardsen, Daniel Kjær, Peter Folmer Nielsen

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    Original languageEnglish
    Publication date2007
    Publication statusPublished - 2007
    EventAVS INSIGHT-2007 Workshop - Napa, Canada
    Duration: 6 May 20079 May 2007

    Workshop

    WorkshopAVS INSIGHT-2007 Workshop
    CountryCanada
    CityNapa
    Period06/05/200709/05/2007

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