A compact microelectrode array chip with multiple measuring sites for electrochemical applications

Maria Dimaki, Marco Vergani, Arto Heiskanen, Dorota Kwasny, Luigi Sasso, Marco Carminati, Juliet A. Gerrard, Jenny Emnéus, Winnie Edith Svendsen

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    Abstract

    In this paper we demonstrate the fabrication and electrochemical characterization of a microchip with 12 identical but individually addressable electrochemical measuring sites, each consisting of a set of interdigitated electrodes acting as a working electrode as well as two circular electrodes functioning as a counter and reference electrode in close proximity. The electrodes are made of gold on a silicon oxide substrate and are passivated by a silicon nitride membrane. A method for avoiding the creation of high edges at the electrodes (known as lift-off ears) is presented. The microchip design is highly symmetric to accommodate easy electronic integration and provides space for microfluidic inlets and outlets for integrated custom-made microfluidic systems on top. © 2014 by the authors; licensee MDPI, Basel, Switzerland.
    Original languageEnglish
    JournalSensors
    Volume14
    Issue number6
    Pages (from-to)9505-9521
    Number of pages17
    ISSN1424-8220
    DOIs
    Publication statusPublished - 2014

    Bibliographical note

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    Keywords

    • Microfabrication
    • Lift-off ears
    • Electrochemical applications
    • Multiple measuring sites

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