A cantilever-based sensor for thermal cycling in buffer solution

Rodolphe Charly Willy Marie, J. Thaysen, Claus Bo Vöge Christensen, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume67
    Issue number8
    Pages (from-to)893-898
    ISSN0167-9317
    Publication statusPublished - 2003

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