A bio/chemical microsystem designed for wafer scale testing

Anders Michael Jørgensen, Klaus Bo Mogensen, Weimin Rong, Pieter Telleman, Jörg Peter Kutter

    Research output: Contribution to conferencePaperResearchpeer-review

    Original languageEnglish
    Publication date2001
    Publication statusPublished - 2001
    EventSPIE 4407; MEMS Design, Fabrication, Characterization, and Packaging -
    Duration: 1 Jan 2001 → …

    Conference

    ConferenceSPIE 4407; MEMS Design, Fabrication, Characterization, and Packaging
    Period01/01/2001 → …

    Cite this

    Jørgensen, A. M., Mogensen, K. B., Rong, W., Telleman, P., & Kutter, J. P. (2001). A bio/chemical microsystem designed for wafer scale testing. Paper presented at SPIE 4407; MEMS Design, Fabrication, Characterization, and Packaging, .