3D Silicon Micro- and Nanostructures for Photonic Devices and Applications

Research output: Contribution to conferencePosterResearchpeer-review

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Original languageEnglish
Publication date2019
Publication statusPublished - 2019
Event45th International conference on Micro and Nano Engineering - Rhodes, Greece
Duration: 23 Sep 201926 May 2021

Conference

Conference45th International conference on Micro and Nano Engineering
CountryGreece
CityRhodes
Period23/09/201926/05/2021

Cite this

Chang, B., Jensen, F., Jansen, H., & Hübner, J. (2019). 3D Silicon Micro- and Nanostructures for Photonic Devices and Applications. Poster session presented at 45th International conference on Micro and Nano Engineering, Rhodes, Greece.