188+188 Row–Column Addressed CMUT Transducer for Super Resolution Imaging

Rune Sixten Grass, Andreas Spandet Havreland, Mathias Engholm, Jørgen Arendt Jensen, Erik Vilain Thomsen

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A capacitive micromachined ultrasonic transducer (CMUT), 8 MHz resonance frequency, λ/2 cell pitch 188+188 row-column addressed (RCA) array for super resolution imaging is presented. The top- and bottom electrode design features a zig-zag shaped pattern to increase the active cell area for fixed plate thicknesses. The RCA CMUT has been fabricated utilising a deposit, remove, etch, multistep (DREM) process to fully separate the bottom electrodes electrically as well as anodic bonding the array to an insulating borosilicate glass wafer. Linear test elements have been characterized. Electrical measurements show a center frequency of approximately 5.5 MHz and a coupling coefficient of 7.8% for -80 V DC bias and 50 mV AC. Acoustic measurements made in immersion with a single cycle 4 MHz pulse with a -90 V DC bias demonstrate that the fabricated CMUT arrays can emit broadband ultrasound pulses.
Original languageEnglish
Title of host publicationProceedings of the IEEE International Ultrasonic Symposium 2019
Publication date2019
ISBN (Electronic)978-1-7281-4596-9
Publication statusPublished - 2019
Event2019 IEEE International Ultrasonics Symposium - SEC Glasgow, Glasgow, United Kingdom
Duration: 6 Oct 20199 Oct 2019


Conference2019 IEEE International Ultrasonics Symposium
LocationSEC Glasgow
Country/TerritoryUnited Kingdom
Internet address


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