1060-nm Tunable Monolithic High Index Contrast Subwavelength Grating VCSEL

Thor Ansbæk, Il-Sug Chung, Elizaveta Semenova, Kresten Yvind

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    We present the first tunable vertical-cavity surface-emitting laser (VCSEL) where the top distributed Bragg reflector has been completely substituted by an air-cladded high-index-contrast subwavelength grating (HCG) mirror. In this way, an extended cavity design can be realized by reducing the reflection at the semiconductor #x2013;air interface using an anti-reflective coating (ARC). We demonstrate how the ARC can be integrated in a monolithic structure by oxidizing AlGaAs with high Al-content. The HCG VCSEL has the potential to achieve polarization stable single-mode output with high tuning efficiency. The HCG VCSEL shows a total tuning range of 16 nm around an emission wavelength of 1060 nm with 1-mW output power.
    Original languageEnglish
    JournalI E E E Photonics Technology Letters
    Issue number4
    Pages (from-to)365-367
    Publication statusPublished - 2013


    • III-V semiconductor materials
    • Microelectromechanical systems
    • Semiconductor lasers
    • Vertical cavity surface emitting lasers


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