電圧制御陽極酸化法により作製した 4H-SiC ポーラス結晶への パッシベーション効果

Translated title of the contribution: Passivation effect on 4H-SiC porous crystals formed by voltage-controlled anodization

Keita Kodera, Kosuke Yanai, Yoma Yamane, Weifang Lu, Yiyu Ou, Motoaki Iwaya, Tetsuya Takeuchi, Satoshi Kamiyama

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Translated title of the contributionPassivation effect on 4H-SiC porous crystals formed by voltage-controlled anodization
Original languageJapanese
Publication date2021
Number of pages1
Publication statusPublished - 2021
Event82nd JSAP Autumn Meeting 2021 - Tenpaku Campus, Meijo University, Nagoya, Japan
Duration: 10 Sept 202113 Sept 2021

Conference

Conference82nd JSAP Autumn Meeting 2021
LocationTenpaku Campus, Meijo University
Country/TerritoryJapan
CityNagoya
Period10/09/202113/09/2021

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