Universal and Flexible 3D Coordinate Metrology for Micro and Nano Components Production

Carli, Lorenzo (PhD Student)
Dirscherl, Kai (Supervisor)
Hansen, Hans Nørgaard (Supervisor)
Horsewell, Andy (Supervisor)
da Costa Carneiro, Kim (Examiner)
Bosse, Harald (Examiner)
De Chiffre, Leonardo (Main Supervisor)
Savio, Enrico (Examiner)

Status	Finished
Effective start/end date	01/09/2007 → 02/02/2011

Funding

DTU stipendium

3D-SEM Metrology for Coordinate Measurements at the Nanometer Scale
Carli, L., 2010, DTU Mechanical Engineering. 266 p.
Research output: Book/Report › Ph.D. thesis

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