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Universal and Flexible 3D Coordinate Metrology for Micro and Nano Components Production
Carli, Lorenzo
(PhD Student)
Dirscherl, Kai
(Supervisor)
Hansen, Hans Nørgaard
(Supervisor)
Horsewell, Andy
(Supervisor)
da Costa Carneiro, Kim
(Examiner)
Bosse, Harald
(Examiner)
De Chiffre, Leonardo
(Main Supervisor)
Savio, Enrico
(Examiner)
Department of Mechanical Engineering
Overview
Fingerprint
Research output
(1)
Project Details
Status
Finished
Effective start/end date
01/09/2007
→
02/02/2011
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Fingerprint
Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
metrology
Physics & Astronomy
100%
scanning electron microscopy
Physics & Astronomy
66%
troughs
Physics & Astronomy
21%
evaluation
Physics & Astronomy
17%
methodology
Physics & Astronomy
15%
wire
Physics & Astronomy
13%
profilometers
Physics & Astronomy
12%
experiment design
Physics & Astronomy
11%
Research output
Research output per year
2010
2010
2010
1
Ph.D. thesis
Research output per year
Research output per year
3D-SEM Metrology for Coordinate Measurements at the Nanometer Scale
Carli, L.
,
2010
,
DTU Mechanical Engineering
.
266 p.
Research output
:
Book/Report
›
Ph.D. thesis
›
Research
File
metrology
100%
scanning electron microscopy
66%
troughs
21%
evaluation
17%
methodology
15%
5831
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