Engineering
Acoustic Mode
7%
Acoustic Pressure
7%
Actuation
100%
Antinode
7%
Clean Rooms
14%
Energy Engineering
7%
Flow Separation
7%
Fourth Order
7%
Gluing
7%
Good Agreement
7%
Hot Spot
21%
Lead Zirconate
7%
Mechanical Part
7%
Metal Plate
7%
Microelectromechanical System
14%
Microfluidic Channel
7%
Microscale
100%
Mixers (Machinery)
7%
Nitride
42%
Nodes
7%
Piezoelectric
42%
Piezoelectric Material
7%
Poisson Ratio
14%
Quality Factor
7%
Standing Wave
7%
Thin Films
100%
Titanate
7%
Transducer
42%
Travelling Wave
14%
Young's Modulus
14%
Material Science
Actuator
7%
Aluminum
21%
Aluminum Nitride
21%
Film
7%
Hazardous Material
7%
Lead Zirconate Titanate
7%
Microelectromechanical System
14%
Nitride Compound
21%
Piezoelectric Material
7%
Piezoelectricity
42%
Plate Metal
7%
Poisson Ratio
14%
Scandium
21%
Silicon
7%
Thin Films
100%
Young's Modulus
14%
Keyphrases
Acoustfluidics
20%
Aluminum Scandium Nitride (AlScN)
60%
Bulk PZT
20%
Continuous Flow Separation
20%
Focus Particles
20%
Micrometer Precision
20%
Thin-film Actuators
20%