Technology Development for Sillicon NEMS devices

Chang, Bingdong (PhD Student)
Jensen, Flemming (Main Supervisor)
Hübner, Jörg (Supervisor)
Jansen, Henri V. (Supervisor)
Hansen, Ole (Examiner)
Tas, Niels (Examiner)
Franssila, Samuli Antero (Examiner)

Department of Physics

Status	Finished
Effective start/end date	01/11/2015 → 14/01/2019

1 Ph.D. thesis

Technology Development of 3D Silicon Plasma Etching Processes for Novel Devices and Applications
Chang, B., 2018, Technical University of Denmark. 194 p.
Research output: Book/Report › Ph.D. thesis › Research

Open Access
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