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Technology Development for Sillicon NEMS devices
Chang, Bingdong
(PhD Student)
Jensen, Flemming
(Main Supervisor)
Hübner, Jörg
(Supervisor)
Jansen, Henri V.
(Supervisor)
Hansen, Ole
(Examiner)
Tas, Niels
(Examiner)
Franssila, Samuli Antero
(Examiner)
Department of Physics
Overview
Fingerprint
Research output
(1)
Project Details
Status
Finished
Effective start/end date
01/11/2015
→
14/01/2019
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Fingerprint
Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
plasma etching
Physics & Astronomy
100%
etching
Physics & Astronomy
66%
silicon
Physics & Astronomy
47%
deposits
Physics & Astronomy
39%
roughness
Physics & Astronomy
27%
microstructure
Physics & Astronomy
25%
aspect ratio
Physics & Astronomy
20%
ions
Physics & Astronomy
15%
Research output
Research output per year
2018
2018
2018
1
Ph.D. thesis
Research output per year
Research output per year
Technology Development of 3D Silicon Plasma Etching Processes for Novel Devices and Applications
Chang, B.
,
2018
,
Technical University of Denmark
.
194 p.
Research output
:
Book/Report
›
Ph.D. thesis
›
Research
Open Access
File
plasma etching
100%
etching
66%
silicon
47%
deposits
39%
roughness
27%
2174
Downloads (Pure)