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Smoothed advanced silicon NEMS devices
Nguyen, Thi Hoang Vy
(PhD Student)
Dussart, Remi
(Examiner)
Summanwar, Anand
(Examiner)
Stamate, Eugen
(Examiner)
Jansen, Henri
(Main Supervisor)
Hübner, Jörg
(Supervisor)
Jensen, Flemming
(Supervisor)
National Centre for Nano Fabrication and Characterization
Nanofabrication
NanoPhoton – Center for Nanophotonics
Process engineering
Overview
Fingerprint
Publications
(1)
Project Details
Status
Finished
Effective start/end date
01/12/2017
→
03/03/2021
Funding
Technical University of Denmark
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Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
Directional
Engineering
100%
Etch Rate
Engineering
100%
Nanoscale
Engineering
100%
Silicon
Material Science
100%
Side Wall
Engineering
60%
Profile Control
Engineering
40%
Aspect Ratio
Engineering
40%
High Aspect Ratio
Engineering
20%
Research output
Research output per year
2020
2020
2020
1
Ph.D. thesis
Research output per year
Research output per year
Directional Nanoscale Silicon Etching using SF
6
and O
2
Plasma
Nguyen, V. T. H.
,
2020
,
DTU Nanolab
.
129 p.
Research output
:
Book/Report
›
Ph.D. thesis
Open Access
File
Directional
100%
Etch Rate
100%
Nanoscale
100%
Silicon
100%
Fluorocarbon
100%
1567
Downloads (Orbit)