Smoothed advanced silicon NEMS devices

Nguyen, Vy Thi Hoang (PhD Student)
Jansen, Henri (Main Supervisor)
Hübner, Jörg (Supervisor)
Jensen, Flemming (Supervisor)

National Centre for Nano Fabrication and Characterization

Status	Active
Effective start/end date	01/12/2017 → 30/11/2020