Smoothed advanced silicon NEMS devices

Nguyen, Vy Thi Hoang (PhD Student)
Jansen, Henri (Main Supervisor)
Hübner, Jörg (Supervisor)
Jensen, Flemming (Supervisor)
Stamate, Eugen (Examiner)
Dussart, Remi (Examiner)
Summanwar, Anand (Examiner)

National Centre for Nano Fabrication and Characterization

Project Details

Status	Finished
Effective start/end date	01/12/2017 → 03/03/2021