Research output per year
Research output per year
Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 01/12/2017 → 03/03/2021 |
Funding
- Technical University of Denmark
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Research output
- 1 Ph.D. thesis
-
Directional Nanoscale Silicon Etching using SF6 and O2 Plasma
Nguyen, V. T. H., 2020, DTU Nanolab. 129 p.Research output: Book/Report › Ph.D. thesis
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