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Nanostructuring with Bonding
Poulsen, Mette
(PhD Student)
Jensen, Flemming
(Main Supervisor)
Thomsen, Erik Vilain
(Examiner)
David, Christian
(Examiner)
Reus, Roger De
(Examiner)
Feidenhans'l, Robert
(Supervisor)
Overview
Fingerprint
Publications
(1)
Project Details
Status
Finished
Effective start/end date
01/05/2001
→
15/06/2006
Funding
Risø (Løn)
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Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
Waveguide
Keyphrases
100%
Plasma-assisted
Keyphrases
100%
Wafer Bonding
Keyphrases
100%
Nanostructures
Keyphrases
100%
Bond Strength
Engineering
100%
X-ray
Keyphrases
80%
Reactive Ion Etching
Keyphrases
60%
Reactive Ion Etch
Engineering
60%
Research output
Research output per year
2006
2006
2006
1
Ph.D. thesis
Research output per year
Research output per year
Nanostructuring with Bonding and Structural Studies of Plasma Assisted Wafer Bonding
Poulsen, M.,
Jun 2006
, Kgs. Lyngby:
Technical University of Denmark
.
175 p.
Research output
:
Book/Report
›
Ph.D. thesis
File
Waveguide
100%
Nanostructures
100%
Wafer Bonding
100%
Plasma-assisted
100%
Bond Strength
100%
513
Downloads (Orbit)