Nanometer metrology with scanning probe microscopy

    Project Details


    Ph.D.: Carsten P. Jensen
    The project deals with metrological problems for scanning probe microscopes (SPM) such as scanning tunnelling microscopy (STM) and atomic force microscopy (AFM). Calibration procedures have been developed for lateral calibration for SPM¿s and the stability and uncertainty has been investigated. With a calibrated AFM investigations have been done on arrays of Vickers hardness indentations to compare the results with traditional optical Vickers hardness measurements. An important part of a SPM is the probing tip. Experiments have been done to determine the size and shape of the tip with field ion microscopy (FIM) and these results have been compared with blind reconstruction of the tip shape from a STM image.
    Effective start/end date01/05/199530/04/1998


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