Cantilevers with dimensions in the submicron regime can be used as very sensitive mass sensors by detecting changes in the resonant frequency of the cantilever. The objective of the project is to fabricate nanometer sized resonating cantilevers with integrated read-out. The cantilevers will be fabricated using AFM and laser lithography on aluminium and the cantilever deflection will be detected by integrated capacitive read-out using a built in CMOS circuit.
|Effective start/end date||01/07/1999 → 01/03/2000|
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