MCM Micromechanics

  • Bouwstra, Siebe (Project Manager)
  • Reus, Roger De (Project Participant)
  • Pheasant, Nicholas James (Project Participant)
  • Egginton, Paul Nicholas (Project Participant)
  • Jensen, Flemming (Project Participant)
  • Hansen, Ejner Mose (Project Participant)

    Project Details

    Description

    The MCM Micromechanics project was completed successfully in 1996. An overview of the work was presented on a seminar November 13th 1996 in several oral presentations and a poster session. More than 50 people from Danish industry and universities participated in the seminar. The final report has been sent to the ministry of industry for evaluation.
    A large effort was put in the development of dedicated processes and demonstrator devices for the MCM Micromechanics project (accelerometers and pressure sensors).
    Pressure sensors for harsh environments are of major importance in industry, and have even bigger potential if their price can be reduced. In this project, this is done by using silicon-based micromachining to integrate the sensor and its packaging on-chip.
    All effort in the MCM acoustics program in 1996 was focused on fabrication of micromechanical accelerometers. There has been worked on two different types:
    1. a piezoelectric accelerometer based on sputtered zinc oxide films
    2. an electron tunnelling accelerometer.
    StatusFinished
    Effective start/end date01/01/199231/12/1996