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Lithography by Atomic Force Microscope and Laser.
Grey, Francois
(Project Manager)
Birkelund, Karen
(Project Participant)
Müllenborn, Matthias
(Project Participant)
Madsen, Steen
(Project Participant)
Overview
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Keyphrases
Lithography
100%
Atomic Force Microscope
100%
Laser-induced Oxidation
50%
Oxidation Method
50%
Combined Oxides
50%
Lithographic Patterning
50%
Micrometer Scale
50%
Nanowires
50%
Oxides
50%
Amorphous Silicon Thin Film
50%
Contact Pads
50%
Passivated
50%
Millimeter-sized
50%
Nanometer Scale
50%
Millimeter-scale
50%
Patent Application
50%
Engineering
Atomic Force Microscope
100%
Lithography
100%
Nanometre
50%
Silicon Layer
50%
Patent Application
50%
Nanowire
50%
Material Science
Silicon
100%
Lithography
100%
Oxide Compound
66%
Amorphous Silicon
33%
Nanowires
33%