Integrated optics for bio/chemical microsystems

Miniaturization of analytical bio/chemical systems opens the possibility of increasing the speed with which analyses are made, reducing the necessary sample size and the consumption of costly reagents. Furthermore, the integration of the chemical system and the detection circuitry can improve reliability and functionality. Thus, by combining optical waveguide photodetector systems with micro channel structures made by means of advanced silicon technology, it should be possible to fabricate miniature integrated systems for chemical analysis which are fast, robust, and potentially inexpensive.
The primary objective for this work is to establish a processing technology which makes possible the integration of optical detection circuits and biochemical microsystems and to demonstrate the use of this technology in the fabrication of useful systems formed on a single substrate. In this research, consideration is also given to developing integrated packaging of these systems in parallel with the development of the processing technology.