Inductively Coupled Plasma Etching for Microsystems

  • Jensen, Søren (PhD Student)
  • Hübner, Jörg (Examiner)
  • Christensen, Carsten (Examiner)
  • Franssila, Samuli Antero (Examiner)
  • Hansen, Ole (Main Supervisor)

    Project Details

    StatusFinished
    Effective start/end date01/04/200122/09/2004

    Research Output

    • 1 Ph.D. thesis

    Inductively Coupled Plasma Etching for Microsystems

    Jensen, S., 2004, Kgs. Lyngby, Denmark: Technical University of Denmark. 125 p.

    Research output: Book/ReportPh.D. thesis