Fabrication of Micro Components by Electrochemical Deposition

The main issue of this thesis is the combination of electrochemical deposition of metals and micro machining. Processes for electroplating and electroless plating of nickel and nickel alloys have been developed and optimised for compatibility with microelectronics and silicon based micromechanics.
The principles of general electrochemistry, electroplating, alloy plating, pulse plating and electroless plating are discussed, as well as measurement methods and improvement of important properties such as internal stress, material distribution, mechanical properties and magnetic properties.