Design and Manufacturing of MicroElectroMechanical Systems (MEMS)

    Project Details


    A systematic tool for the design of MicroElectroMechanical Systems is being developed. The tool is based on numerical topology optimization methods. In contrast to standard scale mechanisms, the micro systems are built in one piece, implying that movement of the mechanism happens by elastic deformation in parts of the device. Different actuation principles are being investigated and potential applications are scanning devices such as atomic force microscopes or in hearing aids. In cooperation with Mikroelektronik Centret (MIC, DTU) the devices are being manufactured and tested.
    (Financed by STVF).
    Effective start/end date01/06/1994 → …