CMOS kompatible multilag metalliske mikrostrukturer for intelligente transducere

  • Ravnkilde, Jan Tue (PhD Student)
  • Sigmund, Ole (Examiner)
  • Gravesen, Peter (Examiner)
  • Wagner, Bernd (Examiner)
  • Hansen, Ole (Main Supervisor)

    Project Details

    StatusFinished
    Effective start/end date01/03/199721/06/2001

    Research Output

    • 1 Ph.D. thesis

    Metallic Microdevices for Monolithic Integrated Microsystems

    Ravnkilde, J. T., 2001, 112 p.

    Research output: Book/ReportPh.D. thesis