Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 01/11/2010 → 19/03/2014 |
Funding
- Technical University of Denmark
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Research output
- 1 Ph.D. thesis
-
Advanced dry etching studies for micro- and nano-systems
Rasmussen, K. H., 2014, DTU Nanotech. 129 p.Research output: Book/Report › Ph.D. thesis
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