Advanced dry etching studies for micro- and nano-systems

    Project Details

    StatusFinished
    Effective start/end date01/11/201019/03/2014

    Research Output

    • 1 Ph.D. thesis

    Advanced dry etching studies for micro- and nano-systems

    Rasmussen, K. H., 2014, DTU Nanotech. 129 p.

    Research output: Book/ReportPh.D. thesisResearch

    Open Access
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