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Advanced dry etching studies for micro- and nano-systems
Rasmussen, Kristian Hagsted
(PhD Student)
Jensen, Flemming
(Supervisor)
Jørgensen, Anders M.
(Supervisor)
Keller, Stephan Sylvest
(Supervisor)
Thomsen, Erik Vilain
(Examiner)
Franssila, Samuli Antero
(Examiner)
Stark, Robert Walther
(Examiner)
Hansen, Ole
(Main Supervisor)
Overview
Fingerprint
Research output
(1)
Project Details
Status
Finished
Effective start/end date
01/11/2010
→
19/03/2014
Funding
Technical University of Denmark
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Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
Dry Etching
Material Science
100%
Reactive Ion Etching
Material Science
100%
Etching Studies
Keyphrases
100%
Sapphire
Material Science
80%
Permalloy
Material Science
20%
Tantalum
Material Science
20%
Epitaxy
Material Science
20%
Poly Methyl Methacrylate
Material Science
20%
Research output
Research output per year
2014
2014
2014
1
Ph.D. thesis
Research output per year
Research output per year
Advanced dry etching studies for micro- and nano-systems
Rasmussen, K. H.,
2014
,
DTU Nanotech
.
129 p.
Research output
:
Book/Report
›
Ph.D. thesis
Open Access
File
Dry Etching
100%
Reactive Ion Etching
100%
Etching Studies
100%
Sapphire
80%
Surface Property
20%
10165
Downloads (Pure)