Advanced dry etching studies for micro- and nano-systems

Rasmussen, Kristian Hagsted (PhD Student)
Jensen, Flemming (Supervisor)
Jørgensen, Anders Michael (Supervisor)
Keller, Stephan Sylvest (Supervisor)
Thomsen, Erik Vilain (Examiner)
Franssila, Samuli Antero (Examiner)
Stark, Robert Walther (Examiner)
Hansen, Ole (Main Supervisor)

Project Details

Status	Finished
Effective start/end date	01/11/2010 → 19/03/2014

Research Output

1 Ph.D. thesis

Advanced dry etching studies for micro- and nano-systems

Rasmussen, K. H., 2014, DTU Nanotech. 129 p.

Research output: Book/Report › Ph.D. thesis › Research

Open Access

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