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Advanced dry etching studies for micro- and nano-systems
Rasmussen, Kristian Hagsted
(PhD Student)
Jensen, Flemming
(Supervisor)
Jørgensen, Anders Michael
(Supervisor)
Keller, Stephan Sylvest
(Supervisor)
Thomsen, Erik Vilain
(Examiner)
Franssila, Samuli Antero
(Examiner)
Stark, Robert Walther
(Examiner)
Hansen, Ole
(Main Supervisor)
Overview
Fingerprint
Research output
(1)
Project Details
Status
Finished
Effective start/end date
01/11/2010
→
19/03/2014
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Tantalum
Physics
100%
Tantalum Oxides
Material Science
100%
Research output
Research output per year
2014
2014
2014
1
Ph.D. thesis
Research output per year
Research output per year
Advanced dry etching studies for micro- and nano-systems
Rasmussen, K. H.
,
2014
,
DTU Nanotech
.
129 p.
Research output
:
Book/Report
›
Ph.D. thesis
Open Access
File
Tantalum
100%
Tantalum Oxides
100%
8825
Downloads (Pure)