3D nanolithography for self-aligned nano- and microstructures

Greve, Anders (PhD Student)
Boisen, Anja (Main Supervisor)
Svendsen, Winnie Edith (Supervisor)
De Grave, Arnaud (Examiner)
Berger, Rüdiger (Examiner)
Hierold, Christofer (Examiner)

1 Ph.D. thesis

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2010

Fabrication of polymer microcantilevers by nanoimprint lithography
Greve, A., 2010, Kgs. Lyngby, Denmark: Technical University of Denmark.
Research output: Book/Report › Ph.D. thesis

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