3D nanolithography for self-aligned nano- and microstructures

  • Greve, Anders (PhD Student)
  • Boisen, Anja (Main Supervisor)
  • Svendsen, Winnie Edith (Supervisor)
  • De Grave, Arnaud (Examiner)
  • Berger, Rüdiger (Examiner)
  • Hierold, Christofer (Examiner)

    Project Details

    Effective start/end date01/02/200722/09/2010

    Research Output

    • 1 Ph.D. thesis

    Fabrication of polymer microcantilevers by nanoimprint lithography

    Greve, A., 2010, Kgs. Lyngby, Denmark: Technical University of Denmark.

    Research output: Book/ReportPh.D. thesisResearch

    Open Access
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