3D nanolithography for self-aligned nano- and microstructures

  • Greve, Anders (PhD Student)
  • Boisen, Anja (Main Supervisor)
  • Svendsen, Winnie Edith (Supervisor)
  • De Grave, Arnaud (Examiner)
  • Berger, Rüdiger (Examiner)
  • Hierold, Christofer (Examiner)

    Project Details

    StatusFinished
    Effective start/end date01/02/2007 → 22/09/2010

    Funding

    • Forskningsrådsfinansiering
    • 1 Ph.D. thesis