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Research Output 2019 2020

  • 2 Journal article
  • 1 Sound/Visual production (digital)

Deep reactive ion etching of ‘grass-free’ widely-spaced periodic 2D arrays, using sacrificial structures

Silvestre, C. M., Nguyen, V. T. H., Jansen, H. & Hansen, O., 2020, In : Microelectronic Engineering. 223, 11 p., 111228.

Research output: Contribution to journalJournal articleResearchpeer-review

On the formation of Black Silicon in SF6-O2 plasma: The CORE sequence and BSi on Demand

Nguyen, V. T. H., 2019

Research output: Non-textual formSound/Visual production (digital)Researchpeer-review

Open Access
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Projects 2017 2020