No photo of Simone Lagana
  • 340, 0.15.E

    2800 Kgs. Lyngby

    Denmark

  • Ørsteds Plads, 347

    DK-2800 Kongens Lyngby

    Denmark

20142019
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Research Output 2014 2019

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Journal article
2017

Direct bonding of ALD Al2O3 to silicon nitride thin films

Laganà, S., Mikkelsen, E. K., Marie, R., Hansen, O. & Mølhave, K., 2017, In : Microelectronic Engineering. 176, p. 71-74 4 p.

Research output: Contribution to journalJournal articleResearchpeer-review