1992 …2022

Research output per year

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Research Output

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Journal article
2005

Fabrication and modeling of narrow capillaries for vacuum system gas inlets

Quaade, U., Jensen, S. & Hansen, O., 2005, In : Journal of Applied Physics. 97, 4, p. 044906

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
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206 Downloads (Pure)

Investigations of the isotropic etch of an ICP source for silicon microlens mold fabrication

Larsen, K. P., Ravnkilde, J. T. & Hansen, O., 2005, In : Journal of Micromechanics and Microengineering. 15, 4, p. 873-882

Research output: Contribution to journalJournal articleResearchpeer-review

Microfabricated high temperature reactor for catalytic partial oxidation of methane

Younes-Metzler, O., Svagin, J., Jensen, S., Christensen, C. H., Hansen, O. & Quaade, U., 2005, In : Appl. Catal. A General. 284, p. 5-10

Research output: Contribution to journalJournal articleResearchpeer-review

Piezoresistance of Silicon and Strained Si0.9Ge0.1

Richter, J., Hansen, O., Larsen, A. N., Hansen, J. L., Eriksen, G. F. & Thomsen, E. V., 2005, In : Sensors and Actuators A: Physical. 123-124C, p. 388-396

Research output: Contribution to journalJournal articleResearchpeer-review

Surface-directed capillary system; theory, experiments and applications

Bouaidat, S., Hansen, O., Bruus, H., Berendsen, C., Bau-Madsen, N. K., Thomsen, P., Wolff, A. & Jonsmann, J., 2005, In : Lab on a Chip. 5, 8, p. 827-836

Research output: Contribution to journalJournal articleResearchpeer-review

1 Downloads (Pure)

Synthesis of crystalline Ge nanoclusters in PE-CVD-deposited SiO2 films

Leervad Pedersen, T. P., Skov Jensen, J., Chevallier, J., Jensen, J. M. & Hansen, O., 2005, In : APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. 81, 8, p. 1591-1593

Research output: Contribution to journalJournal articleResearchpeer-review

2004

Deep Reactive Ion Etching for High Aspect Ratio Microelectromechanical Components

Jensen, S., Yalcinkaya, A. D., Jacobsen, S., Rasmussen, T., Rasmussen, F. E. & Hansen, O., 2004, In : Physica Scripta. Topical Issues. T114, p. 188-192

Research output: Contribution to journalJournal articleResearchpeer-review

First experimental results on CMOS Integrated Nickel Electroplated Resonators

Yalcinkaya, A. D. & Hansen, O., 2004, In : Physica Scripta. T114, p. 184-187

Research output: Contribution to journalJournal articleResearchpeer-review

Flame spray deposition of porous catalysts on surfaces and in microsystems

Thybo, S., Jensen, S., Johansen, J., Johannessen, T., Hansen, O. & Quaade, U., 2004, In : Journal of Catalysis. 223, 2, p. 271-277

Research output: Contribution to journalJournal articleResearchpeer-review

Mechanical Characterization and design of flexible silicon microstructures

Lisby, T., Nikles, S. A., Najafi, K., Hansen, O., Bouwstra, S. & Branebjerg, J., 2004, In : I E E E Journal of Microelectromechanical Systems. 13, 3, p. 452-464

Research output: Contribution to journalJournal articleResearchpeer-review

Microcantilever equipped with nanowire template electrodes for multiprobe measurement on fragile nanostructures

Lin, R., Bøggild, P. & Hansen, O., 2004, In : Journal of Applied Physics. 96, 5, p. 2895-2900

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
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278 Downloads (Pure)

Micro-four-point-probe characterization of nanowires fabricated using the nanostencil technique

Lin, R., Bammerlin, M., Hansen, O., Schlittler, R. R. & Bøggild, P., 2004, In : Nanotechnology. 15, 9, p. 1363-1367

Research output: Contribution to journalJournal articleResearchpeer-review

Microsystem with integrated capillary leak to mass spectrometer for high sensitivity temperature programmed desorption

Quaade, U., Jensen, S. & Hansen, O., 2004, In : Review of Scientific Instruments. 75, 10, p. 3345-3347

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
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296 Downloads (Pure)
2003

AFM lithography of aluminum for fabrication of nanomechanical systems

Davis, Z. J., Abadal, G., Hansen, O., Borisé, X., Barniol, N., Perez-Murano, F. & Boisen, A., 2003, In : Ultramicroscopy. 97, 1-4, p. 467-472

Research output: Contribution to journalJournal articleResearchpeer-review

Atomic force microscope characterization of a resonating nanocantilever

Abadal, G., Davis, Z. J., Borrise, X., Hansen, O., Boisen, A., Barniol, N., Perez-Murano, F. & Serra, F., 2003, In : Ultramicroscopy. 97, 1-4, p. 127-133

Research output: Contribution to journalJournal articleResearchpeer-review

MEMS device for bending test: measurements of fatigue and creep of electroplated nickel

Larsen, K. P., Rasmussen, A. A., Ravnkilde, J. T., Ginnerup, M. & Hansen, O., 2003, In : Sensors and Actuators A: Physical. 103, 1-2, p. 156-164

Research output: Contribution to journalJournal articleResearchpeer-review

Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Davis, Z. J., Abadal, G., Helbo, B., Hansen, O., Campabadal, F., Perez-Murano, F., Esteve, J., Figueras, E., Verd, J., Barniol, N. & Boisen, A., 2003, In : Sensors and Actuators A-physical. 105, 3, p. 311-319

Research output: Contribution to journalJournal articleResearchpeer-review

Resolution enhancement of scanning four-point-probe measurements on two-dimensional systems.

Hansen, T. M., Stokbro, K., Hansen, O., Hassenkam, T., Shiraki, I., Hasegawa, S. & Bøggild, P., 2003, In : Review of Scientific Instruments. 74, 8, p. 3701-3708

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
312 Downloads (Pure)
2002

Fabrication of integrated metallic MEMS devices

Yalcinkaya, A. D., Ravnkilde, J. T. & Hansen, O., 2002, In : Electronics letters. 38, 24, p. 1526-1527

Research output: Contribution to journalJournal articleResearchpeer-review

Magnetic flux generator for balanced membrane loudspeaker

Rehder, J., Rombach, P. & Hansen, O., 2002, In : Sensors and Actuators A-physical. 97-8, p. 61-67

Research output: Contribution to journalJournal articleResearchpeer-review

Optimization of sensitivity and noise in piezoresistive cantilevers

Yu, X., Thaysen, J., Hansen, O. & Boisen, A., 2002, In : Journal of Applied Physics. 92, 10, p. 6296-6301

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
526 Downloads (Pure)

Scanning microscopic four-point conductivity probes

Petersen, C. L., Hansen, T. M., Bøggild, P., Boisen, A., Hansen, O., Hassenkam, T. & Grey, F., 2002, In : Sensors and Actuators A-physical. 96, 1, p. 53-58

Research output: Contribution to journalJournal articleResearchpeer-review

2001

Balanced membrane micromachined loudspeaker for hearing instrument application

Rehder, J., Rombach, P. & Hansen, O., Jul 2001, In : Journal of Micromechanics and Microengineering. 11, 4, p. 334-338

Research output: Contribution to journalJournal articleResearchpeer-review

Electroplating and characterization of cobalt-nickel-iron and nickel-iron for magnetic microsystems applications

Rasmussen, F. E., Ravnkilde, J. T., Tang, P. T., Hansen, O. & Bouwstra, S., 2001, In : Sensors and Actuators A-physical. 92, 1-3, p. 242-248 7 p.

Research output: Contribution to journalJournal articleResearchpeer-review

2000

AFM probe with piezorestive read-out and highly symmentrical Wheatstone bridge arrangement

Thaysen, J., Boisen, A., Hansen, O. & Bouwstra, S., 2000, In : Sensors and Actuators. 83, 83, p. 47-53

Research output: Contribution to journalJournal articleResearchpeer-review

A microcantilever-based alcohol vapor sensor-application and response model

Jensenius, H., Thaysen, J., Rasmussen, A. A., Veje, L. H., Hansen, O. & Boisen, A., 2000, In : Applied Physics Letters. 76, 18, p. 2615-2617

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
279 Downloads (Pure)

Environmental sensors based on micromachined cantilevers with integrated read-out

Boisen, A., Thaysen, J., Jensenius, H. & Hansen, O., 2000, In : Ultramicroscopy. 82, 1-4, p. 11-16

Research output: Contribution to journalJournal articleResearchpeer-review

Fabrication and characterization of nano-resonating devices for mass detection

Davis, Z., Abadal, G., Kuhn, O., Hansen, O., Grey, F. & Boisen, A., 2000, In : Journal of Vacuum Science & Technology B. 18, 2, p. 612-612

Research output: Contribution to journalJournal articleResearchpeer-review

Low temperature anodic bonding to silicon nitride

Weichel, S., Reus, R. D., Bouaidat, S., Rasmussen, P., Hansen, O., Birkelund, K. & Dirac, P. A. H., 2000, In : Sensors and Actuators A: Physical. 82, 1-3, p. 249-253

Research output: Contribution to journalJournal articleResearchpeer-review

Mechanical characterization of Electroplated NiFe

Ravnkilde, J. T., Ziebart, V., Hansen, O. & Baltes, H., 2000, In : Sensors and Materials. 12, 2, p. 98-108

Research output: Contribution to journalJournal articleResearchpeer-review

1999

Combined laser and atomic force microscope lithography on aluminum: Mask fabrication for nanoelectromechanical systems

Berini, A. G., Boisen, A., Davis, Z. J., Hansen, O. & Grey, F., 1999, In : Applied Physics Letters. 74, 21, p. 3206-3208

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
260 Downloads (Pure)

Micromachined double backplate differential capacitive microphone.

Bay, J., Hansen, O. & Bouwstra, S., 1999, In : Journal of Micromechanics and Microengineering. 9, 1, p. 30-33

Research output: Contribution to journalJournal articleResearchpeer-review

Noise in piezoresistive atomic force microscopy

Hansen, O. & Boisen, A., 1999, In : Nanotechnology. 10, 1, p. 51-60

Research output: Contribution to journalJournal articleResearchpeer-review

1998

Fabrication of submicron suspended structures by laser and AFM lithography on aluminium combined with reactive ion etching

Boisen, A., Birkelund, K., Hansen, O. & Grey, F., 1998, In : Journal of Vacuum Science & Technology B. 16, 6 Nov/Dec, p. 2977-2981

Research output: Contribution to journalJournal articleResearchpeer-review

Fabrication of submicron suspended structures by laser and AFM lithography on aluminum combined with reactive ion etching.

Boisen, A., Birkelund, K., Hansen, O. & Grey, F., 1998, In : Journal of Vacuum Science & Technology B. 16, 6, p. 2977-81

Research output: Contribution to journalJournal articleResearchpeer-review

Field-Induced Deformation as a Mechanism for Scanning Tunneling Microscopy Based Nanofabrication

Hansen, O., Ravnkilde, J. T., Quaade, U., Stokbro, K. & Grey, F., 1998, In : Physical Review Letters. 81, 25, p. 5572-5575

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
195 Downloads (Pure)
1997

Cold-walled UHV/CVD batch reactor for the growth of Si1_x/Gex layers

Thomsen, E. V., Christensen, C., Andersen, C. R., Pedersen, E. V., Egginton, P. N., Hansen, O. & Petersen, J. W., 1997, In : Thin Solid Films. 294, 1-2, p. 72-75

Research output: Contribution to journalJournal articleResearchpeer-review

New approaches to atomic force microscope lithography on silicon

Birkelund, K., Thomsen, E. V., Rasmussen, J. P., Hansen, O., Tang, P. T., Møller, P. & Grey, F., 1997, In : Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures. 15, 6, p. 2912-2915

Research output: Contribution to journalJournal articleResearchpeer-review

Spatial variation of the etch rate for deep etching of silicon by reactive ion etching

Andersen, B. A. M., Hansen, O. & Kristensen, M., 1997, In : Journal of Vacuum Science & Technology B. 15, 4, p. 993-999

Research output: Contribution to journalJournal articleResearchpeer-review

1996

AFM probes with directly fabricated tips

Boisen, A., Hansen, O. & Bouwstra, S., 1996, In : Journal of Micromechanics and Microengineering. 6, p. 58-62

Research output: Contribution to journalJournal articleResearchpeer-review

Design of a silicon microphone with differential read-out of a sealed double parallel-plate capacitor

Bay, J., Hansen, O. & Bouwstra, S., 1996, In : Sensors and Actuators A: Physical. 53, p. 232-236

Research output: Contribution to journalJournal articleResearchpeer-review

Indirect tip fabrication for scanning probe microscopy

Boisen, A., Rasmussen, J. P., Hansen, O. & Bouwstra, S., 1996, In : Microelectronic Engineering. 30, p. 579-582

Research output: Contribution to journalJournal articleResearchpeer-review

The diagonal and off-diagonal AC conductivity of two-dimensional electron gases with contactless Corbino geometry in the quantum Hall regime

Petersen, C. L. & Hansen, O. P., 1996, In : Journal of Applied Physics. 80, 8, p. 4479-4483

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
348 Downloads (Pure)
1994

Terahertz radiation from delta-doped GaAs

Birkedal, D., Hansen, O., Sørensen, C. B., Jarasiunas, K., Brorson, S. D. & Keiding, S. R., 1994, In : Applied Physics Letters. 65, 1, p. 79-81

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
238 Downloads (Pure)