If you made any changes in Pure these will be visible here soon.

Research Output 1994 2020

2002

Cantilever Biosensor with Integrated Read-out Optimised for Operation in Liquid

Rasmussen, P., Thaysen, J., Hansen, O., Eriksen, S. C. & Boisen, A., 2002, Proceedings of Eurosensors XVI. p. 705-706

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

295 Downloads (Pure)

Devices for fatigue testing of electroplated nickel (MEMS)

Larsen, K. P., Ravnkilde, J. T., Ginnerup, M. & Hansen, O., 2002, The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002.. IEEE, p. 443-446

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File

Fabrication and characterization of Flexible Silicon Substrates with Electroplated Leads

Lisby, T., Hansen, O. & Branebjerg, J., 2002, Proceedings of the Institute of Electrical and Electronics Engineers Sensors conference (IEEE). p. 568-571

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Fabrication of integrated metallic MEMS devices

Yalcinkaya, A. D., Ravnkilde, J. T. & Hansen, O., 2002, In : Electronics letters. 38, 24, p. 1526-1527

Research output: Contribution to journalJournal articleResearchpeer-review

Flexible silicon substrates with Cu leads and BCB dielectric

Lisby, T., Hansen, O. & Branebjerg, J., 2002, Proceedings of Eurosensors XVI. p. 153-154

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Inverse Microloading Effect in Reactive Ion Etching of Silicon

Jensen, S. & Hansen, O., 2002, Proceedings of the International Symposium on Plasma Processing XIV Philadelphia. p. 218-226

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Magnetic flux generator for balanced membrane loudspeaker

Rehder, J., Rombach, P. & Hansen, O., 2002, In : Sensors and Actuators A-physical. 97-8, p. 61-67

Research output: Contribution to journalJournal articleResearchpeer-review

Magnetic reluctance change actuator for loudspeaker application

Rehder, J., Andersen, L. H., Rombach, P. & Hansen, O., 2002, Proceedings of Eurosensors XVI. p. 435-436

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems

Pérez-Murano, F., Davis, Z. J., Forsén, E. S., Dong, M., Montserrat, J., Abadal, G., Borrisé, X., Hansen, O., Boisen, A. & Barniol, N., 2002, Proceedings of Micro- and nanoengineering (MNE). p. 272-273

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

462 Downloads (Pure)

Optimization of sensitivity and noise in piezoresistive cantilevers

Yu, X., Thaysen, J., Hansen, O. & Boisen, A., 2002, In : Journal of Applied Physics. 92, 10, p. 6296-6301

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File

Scanning microscopic four-point conductivity probes

Petersen, C. L., Hansen, T. M., Bøggild, P., Boisen, A., Hansen, O., Hassenkam, T. & Grey, F., 2002, In : Sensors and Actuators A-physical. 96, 1, p. 53-58

Research output: Contribution to journalJournal articleResearchpeer-review

2001

A SUBSTRATE AND A METHOD FOR DETERMINING AND/OR MONITORING ELECTROPHYSIOLOGICAL PROPERTIES OF ION CHANNELS

Petersen, J. W., Telleman, P., Hansen, O., Christophersen, P., Bech, M., Olesen, S. P., Due, J. & Thomsen, L., 2001, Patent No. WO2001025769, 12 Apr 2001

Research output: Patent

Balanced membrane micromachined loudspeaker for hearing instrument application

Rehder, J., Rombach, P. & Hansen, O., Jul 2001, In : Journal of Micromechanics and Microengineering. 11, 4, p. 334-338

Research output: Contribution to journalJournal articleResearchpeer-review

Electroplating and characterization of cobalt-nickel-iron and nickel-iron for magnetic microsystems applications

Rasmussen, F. E., Ravnkilde, J. T., Tang, P. T., Hansen, O. & Bouwstra, S., 2001, In : Sensors and Actuators A-physical. 92, 1-3, p. 242-248 7 p.

Research output: Contribution to journalJournal articleResearchpeer-review

High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS

Davis, Z. J., Abadal, G., Helbo, B., Hansen, O., Campabadal, F., Pérez-Murano, F., Esteve, J., Figueras, E., Ruiz, R., Barniol, N. & Boisen, A., 2001, Proceeding of Transdusers ’01. p. 72-75

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS ciruitry

Davis, Z. J., Abadal, G., Helbo, B., Hansen, O., Campabadal, F., Pérez-Murano, F., Esteve, J., Figueras, E., Ruiz, R., Barniol, N. & Boisen, A., 2001, Proceedings of STM ’01. 47 p.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Magnetic flux generator for balanced membrane loudspeaker

Rehder, J., Rombach, P. & Hansen, O., 2001, Digest of Technical papers, Springer-Verlag Transducers ’01.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Methods for Fabrication of Released Nickel Comb-Drive Devices on CMOS

Yalcinkaya, A. D., Ravnkilde, J. T., Johansen, L. S. & Hansen, O., 2001, Digest of Technical Papers, Springer-Verlag Transducers. p. 600-603

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

2000

AFM probe with piezorestive read-out and highly symmentrical Wheatstone bridge arrangement

Thaysen, J., Boisen, A., Hansen, O. & Bouwstra, S., 2000, In : Sensors and Actuators. 83, 83, p. 47-53

Research output: Contribution to journalJournal articleResearchpeer-review

239 Downloads (Pure)

A microcantilever-based alcohol vapor sensor-application and response model

Jensenius, H., Thaysen, J., Rasmussen, A. A., Veje, L. H., Hansen, O. & Boisen, A., 2000, In : Applied Physics Letters. 76, 18, p. 2615-2617

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File

Balanced Membrane Micromachined Loudspeaker for Hearing Instrument Application

Rehder, J., Rombach, P. & Hansen, O., 2000, MME’00. Uppsala, Finland

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Elecroplating and characterization of cobalt-nickel-iron for magnetic microsystems applications.

Rasmussen, F. E., Ravnkilde, J. T., Tang, P. T., Hansen, O. & Bouwstra, S., 2000, EuroSensors. Elsevier, 7 p.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Environmental sensors based on micromachined cantilevers with integrated read-out

Boisen, A., Thaysen, J., Jensenius, H. & Hansen, O., 2000, In : Ultramicroscopy. 82, 1-4, p. 11-16

Research output: Contribution to journalJournal articleResearchpeer-review

Fabrication and characterization of nano-resonating devices for mass detection

Davis, Z., Abadal, G., Kuhn, O., Hansen, O., Grey, F. & Boisen, A., 2000, In : Journal of Vacuum Science & Technology B. 18, 2, p. 612-612

Research output: Contribution to journalJournal articleResearchpeer-review

Fabrication of Microcomponents by Electrochemical Manufacturing: Advanced Feed-Through Metallisation on Silicon and Nickel Micromechanical Resonators

Tang, P. T., Heschel, M., Ravnkilde, J. T., Hansen, O., Møller, P. & Alting, L., 2000, 1st euspen topical conference on Fabrication and Metrology in Nanotechnology. IPL

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Low temperature anodic bonding to silicon nitride

Weichel, S., Reus, R. D., Bouaidat, S., Rasmussen, P., Hansen, O., Birkelund, K. & Dirac, P. A. H., 2000, In : Sensors and Actuators A: Physical. 82, 1-3, p. 249-253

Research output: Contribution to journalJournal articleResearchpeer-review

Mechanical characterisation of flexible silicon microstructures

Lisby, T., Nikles, S., Najafi, K., Hansen, O., Bouwstra, S. & Branebjerg, J., 2000, Proceedings of Euorosensors XIV. Copenhagen, Denmark, p. 157-158

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Mechanical characterization of Electroplated NiFe

Ravnkilde, J. T., Ziebart, V., Hansen, O. & Baltes, H., 2000, In : Sensors and Materials. 12, 2, p. 98-108

Research output: Contribution to journalJournal articleResearchpeer-review

Nanocantilever devices for mass detection - fabrication and characterization

Davis, Z. J., Abadal, G., Helbo, B., Hansen, O., Grey, F. & Boisen, A., 2000, Proceedings of 1st euspen topical conference on fabrication and metrology in nanotechnology. Copenhagen, Denmark, p. 81-89

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Solid state silicon based condenser microphone for hearing aid, has transducer chip and IC chip between intermediate chip and openings on both sides of intermediate chip, to allow sound towards diaphragm

Hansen, O., Heschel, M., Bouwstra, S., Müllenborn, M., Hvims, H., Rombach, P. & Gravad, M. A., 2000, Patent No. US6088463-A, 11 Jul 2000

Research output: Patent

1999

AFM probe with piezoresistive read-out and highly symmetrical wheatstone bridge arrangement.

Thaysen, J., Boisen, A., Hansen, O. & Bouwstra, S., 1999, AFM probe with piezoresistive read-out and highly symmetrical wheatstone bridge arrangement.. The Institute of Electrical Engineers of Japan, p. 1852-1855

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

225 Downloads (Pure)

Combined laser and atomic force microscope lithography on aluminum: Mask fabrication for nanoelectromechanical systems

Berini, A. G., Boisen, A., Davis, Z. J., Hansen, O. & Grey, F., 1999, In : Applied Physics Letters. 74, 21, p. 3206-3208

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File

Electroplated Ni Comb accelerometers for CMOS post processing.

Johansen, L. S., Ravnkilde, J. T., Yalcinkaya, A. D. & Hansen, O., 1999, Electroplated Ni Comb accelerometers for CMOS post processing.. p. 409-410

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Fabrication of electroplated nickel micromechanical resonators.

Ravnkilde, J. T., Yalcinkaya, A. D., Johansen, L. S. & Hansen, O., 1999, Fabrication of electroplated nickel micromechanical resonators.. Academic Press

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

Gas sensor based on micromachined cantilevers with integrated read-out.

Jensenius, H., Thaysen, J., Rasmussen, A. A., Veje, L. H., Hansen, O. & Boisen, A., 1999, Gas sensor based on micromachined cantilevers with integrated read-out.. p. 586-587

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Laser and AFM lithography on aluminum: a toolbox for fabrication of nanoelectromechanical structures.

Boisen, A., Abadal, G., Davis, Z. J., Hansen, O. & Grey, F., 1999, Laser and AFM lithography on aluminum: a toolbox for fabrication of nanoelectromechanical structures.. p. 337-338

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Mechanical characterisation of electroplated nickel-iron.

Ravnkilde, J. T., Ziebart, V., Hansen, O. & Baltes, H., 1999, Mechanical characterisation of electroplated nickel-iron.. p. 191-192

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Micromachined double backplate differential capacitive microphone.

Bay, J., Hansen, O. & Bouwstra, S., 1999, In : Journal of Micromechanics and Microengineering. 9, 1, p. 30-33

Research output: Contribution to journalJournal articleResearchpeer-review

Noise in piezoresistive atomic force microscopy

Hansen, O. & Boisen, A., 1999, In : Nanotechnology. 10, 1, p. 51-60

Research output: Contribution to journalJournal articleResearchpeer-review

1998

Fabrication of submicron suspended structures by laser and AFM lithography on aluminium combined with reactive ion etching

Boisen, A., Birkelund, K., Hansen, O. & Grey, F., 1998, In : Journal of Vacuum Science & Technology B. 16, 6 Nov/Dec, p. 2977-2981

Research output: Contribution to journalJournal articleResearchpeer-review

Fabrication of submicron suspended structures by laser and AFM lithography on aluminum combined with reactive ion etching.

Boisen, A., Birkelund, K., Hansen, O. & Grey, F., 1998, In : Journal of Vacuum Science & Technology B. 16, 6, p. 2977-81

Research output: Contribution to journalJournal articleResearchpeer-review

165 Downloads (Pure)

Field-Induced Deformation as a Mechanism for Scanning Tunneling Microscopy Based Nanofabrication

Hansen, O., Ravnkilde, J. T., Quaade, U., Stokbro, K. & Grey, F., 1998, In : Physical Review Letters. 81, 25, p. 5572-5575

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File

Novel AFM Probes - Fabrication and Characterization

Boisen, A., Hansen, O. & Bouwstra, S., 1998, Third Microstructure Workshop. Uppsala: Uppsala University

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Novel AFM Probes - Fabrication and Characterization

Boisen, A., Hansen, O., Bouwstra, S. & Grey, F., 1998, Nanoscience for Nanotechnology. Hindsgavl: The European Communities

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

Released Metallic Microstructures

Ravnkilde, J. T., Hansen, O. & Tang, P. T., 1998, Proceedings of The Ninth Micromechanics Europe Workshop,MME'98. Ulvik: IOP Publishing, p. 86-89

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Solid State Diffusion

Hansen, O., 1998, 23 p.

Research output: Book/ReportBookResearchpeer-review

The Bipolar Transistor

Hansen, O., 1998, 21 p.

Research output: Book/ReportBookResearchpeer-review

The Bipolar Transistor - Simple Theory

Hansen, O., 1998, 22 p.

Research output: Book/ReportBookResearchpeer-review

The MOS Capacitor

Hansen, O., 1998, 20 p.

Research output: Book/ReportBookResearchpeer-review

1997

Cold-walled UHV/CVD batch reactor for the growth of Si1_x/Gex layers

Thomsen, E. V., Christensen, C., Andersen, C. R., Pedersen, E. V., Egginton, P. N., Hansen, O. & Petersen, J. W., 1997, In : Thin Solid Films. 294, 1-2, p. 72-75

Research output: Contribution to journalJournal articleResearchpeer-review