1992 …2022

Research output per year

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Research Output

2005

Flexible stamp for thermal nanoimprint lithography

Nielsen, T., Pedersen, R. H., Hansen, O., Ahopelto, J. & Kristensen, A., 2005.

Research output: Contribution to conferencePosterResearchpeer-review

High-Temperature Compatible Nickel Silicide Thermometer And Heater For Catalytic Chemical Microreactors

Jensen, S., Quaade, U. J. & Hansen, O., 2005, Proceedings of the 18th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2005. January 30 - February 3. IEEE, p. 463-466

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Integrated nickel disilicide thermometers for high-temperature applications

Thorsteinsson, S., Jensen, S., Younes-Metzler, O., Quaade, U. & Hansen, O., 2005, Proceedings of the 16th Micromechanics Europe Workshop (MME), September 4-6. Gothenburg, Sweden, p. 248-251

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Investigations of the isotropic etch of an ICP source for silicon microlens mold fabrication

Larsen, K. P., Ravnkilde, J. T. & Hansen, O., 2005, In : Journal of Micromechanics and Microengineering. 15, 4, p. 873-882

Research output: Contribution to journalJournal articleResearchpeer-review

Low pressure thermal nanoimprint with autiomatic demolding

Pedersen, R. H., Kristensen, A., Nielsen, T. & Hansen, O., 2005.

Research output: Contribution to conferencePosterResearchpeer-review

Magnetic separation in microfluidic systems using microfabricated electromagnets - Experiments and simulations

Smistrup, K., Hansen, O., Bruus, H. & Hansen, M. F., 2005, In : Journal of Magnetism and Magnetic Materials. 293, 1, p. 597-604

Research output: Contribution to journalConference articleResearchpeer-review

Microfabricated high temperature reactor for catalytic partial oxidation of methane

Younes-Metzler, O., Svagin, J., Jensen, S., Christensen, C. H., Hansen, O. & Quaade, U., 2005, In : Appl. Catal. A General. 284, p. 5-10

Research output: Contribution to journalJournal articleResearchpeer-review

Passivation of Ge nanocrystals in SiO2

Jensen, J. S., Pedersen, T. P. L., Pereira, R., Bomholt, P., Chevallier, J., Hansen, O., Larsen, A. N. & Nielsen, B. B., 2005, In : Solid State Phenomena. 108-109, p. 33-38

Research output: Contribution to journalConference articleResearchpeer-review

Piezoresistance of Silicon and Strained Si0.9Ge0.1

Richter, J., Hansen, O., Larsen, A. N., Hansen, J. L., Eriksen, G. F. & Thomsen, E. V., 2005, In : Sensors and Actuators A: Physical. 123-124C, p. 388-396

Research output: Contribution to journalJournal articleResearchpeer-review

Studying Different Effects on the Collection Efficiency of a Dielectrophoresis Based Selective Filter in a Microchip With Integrated Flow Cytometers

Wolff, A., Wang, Z., Petersen, P. K., Rogeberg, A., Kutter, J. P., Bang, D. D. & Hansen, O., 2005, Proceedings of Transducers 2005. Vol. 2. p. 1728-1732

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

2 Downloads (Pure)

Surface-directed capillary system; theory, experiments and applications

Bouaidat, S., Hansen, O., Bruus, H., Berendsen, C., Bau-Madsen, N. K., Thomsen, P., Wolff, A. & Jonsmann, J., 2005, In : Lab on a Chip. 5, 8, p. 827-836

Research output: Contribution to journalJournal articleResearchpeer-review

1 Downloads (Pure)

Synthesis of crystalline Ge nanoclusters in PE-CVD-deposited SiO2 films

Leervad Pedersen, T. P., Skov Jensen, J., Chevallier, J., Jensen, J. M. & Hansen, O., 2005, In : APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. 81, 8, p. 1591-1593

Research output: Contribution to journalJournal articleResearchpeer-review

Transient studies using silicon-fabricated microreactors with integrated capillary leaks.

Quaade, U. J., Jensen, S. & Hansen, O., 2005, Proceedings of the 7th European Congress on Catalysis. Sofia, Bulgaria, p. 4-32

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Uniformity improving dummy structures for deep reactive ion etching (DRIE) processes

Jensen, S., Jensen, J. M., Quaade, U. J. & Hansen, O., 2005, Proceedings of SPIE. Vol. 5715. p. 39-46

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

2004

Characterization of the Microloading Effect in Deep Reactive Ion Etching of Silicon

Jensen, S. & Hansen, O., 2004, Proceedings of the SPIE International Symposium on Micromachining and Microfabrication. Vol. 5342. p. 111-118

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Concentration changes due to thermal diffusion effects in gas flow micro-systems with temperature gradients

Quaade, U., Johannessen, T., Jensen, S. & Hansen, O., 2004, Proceedings of the 8th International Conference on Miniaturized Systems for Chemistry and Life sciences. Vol. 1. p. 216-218

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Deep Reactive Ion Etching for High Aspect Ratio Microelectromechanical Components

Jensen, S., Yalcinkaya, A. D., Jacobsen, S., Rasmussen, T., Rasmussen, F. E. & Hansen, O., 2004, In : Physica Scripta. Topical Issues. T114, p. 188-192

Research output: Contribution to journalJournal articleResearchpeer-review

Effect of Time and Micropatterns on the Behaviour of Preosteoblastic Cells

Justesen, J., Andersen, L. K., Cantera Antoranz, S., Duch, M., Hansen, O., Lorentzen, M., Chevallier, J., Foss, M., Pedersen, F. S. & Besenbacher, F., 2004, Proceedings of the 7th World Biomaterials Congress.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

First experimental results on CMOS Integrated Nickel Electroplated Resonators

Yalcinkaya, A. D. & Hansen, O., 2004, In : Physica Scripta. T114, p. 184-187

Research output: Contribution to journalJournal articleResearchpeer-review

Flame spray deposition of porous catalysts on surfaces and in microsystems

Thybo, S., Jensen, S., Johansen, J., Johannessen, T., Hansen, O. & Quaade, U., 2004, In : Journal of Catalysis. 223, 2, p. 271-277

Research output: Contribution to journalJournal articleResearchpeer-review

Flexible Stamp for Homegenous Large Area Thermal NIL

Nielsen, T., Pedersen, R. H., Hansen, O., Haatainen, T., Tollki, A., Ahopelto, J. & Kristensen, A., 2004, Proceedings of the Third International Conference on Nanoimprint and Nanoprint Technology (NNT).

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Large concentration changes due to thermal diffusion effects in gas flow microsystems with temperature gradients

Quaade, U., Johannessen, T., Jensen, S. & Hansen, O., 2004.

Research output: Contribution to conferencePosterResearch

Mechanical Characterization and design of flexible silicon microstructures

Lisby, T., Nikles, S. A., Najafi, K., Hansen, O., Bouwstra, S. & Branebjerg, J., 2004, In : I E E E Journal of Microelectromechanical Systems. 13, 3, p. 452-464

Research output: Contribution to journalJournal articleResearchpeer-review

Microcantilever equipped with nanowire template electrodes for multiprobe measurement on fragile nanostructures

Lin, R., Bøggild, P. & Hansen, O., 2004, In : Journal of Applied Physics. 96, 5, p. 2895-2900

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
239 Downloads (Pure)

Microelectromagnet for magnetic manipulation in lab-on-a-chip systems

Smistrup, K., Tang, P. T., Hansen, O. & Hansen, M. F., 2004, Proceedings of Lab-On-A-Chip.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Micro-four-point-probe characterization of nanowires fabricated using the nanostencil technique

Lin, R., Bammerlin, M., Hansen, O., Schlittler, R. R. & Bøggild, P., 2004, In : Nanotechnology. 15, 9, p. 1363-1367

Research output: Contribution to journalJournal articleResearchpeer-review

Microsystems: from small things to great companies

Hansen, O. & Menon, A. K., 2004, BRIDGING from technology to society: DTU 1829-2004 - 175 år. Stubkjær, K. & Kortenbach, T. (eds.). Kgs.Lyngby

Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

Microsystem with integrated capillary leak to mass spectrometer for high sensitivity temperature programmed desorption

Quaade, U., Jensen, S. & Hansen, O., 2004, In : Review of Scientific Instruments. 75, 10, p. 3345-3347

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
255 Downloads (Pure)

Piezoresistance of Silicon and Strained Si1-xGex

Richter, J., Hansen, O., Larsen, A. N., Hansen, J. L., Eriksen, G. F. & Thomsen, E. V., 2004, Technical Digest, Eurosensors 2004. p. 961-964

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Selective magnetic bead capture using an addressable on-chip electromagnetic array

Smistrup, K., Hansen, O., Tang, P. T. & Hansen, M. F., 2004, Proceedings of MicroTAS 2004, the eighth international conference on miniaturised systems for chemistry and life sciences. Laurell, T., Nilsson, J., Jensen, K., Harrison, D. J. & Kutter, J. P. (eds.). Vol. 1. p. 509-511

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

2003

AFM lithography of aluminum for fabrication of nanomechanical systems

Davis, Z. J., Abadal, G., Hansen, O., Borisé, X., Barniol, N., Perez-Murano, F. & Boisen, A., 2003, In : Ultramicroscopy. 97, 1-4, p. 467-472

Research output: Contribution to journalJournal articleResearchpeer-review

A High Aspect Ratio, Low Voltage Tunable RF Capacitor

Yalcinkaya, A. D., Jensen, S. & Hansen, O., 2003, Proceedings of the 17th European Conference on Solid-State Tranducers (Eurosensors). p. 434-437

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

A Low-Power CMOS Interface Chip for Data Logging Applications

Wismar, U. S., Yalcinkaya, A. D. & Hansen, O., 2003, Proceedings of the A Low-Power CMOS Interface Chip for Data Logging Applications. p. 831-834

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Atomic force microscope characterization of a resonating nanocantilever

Abadal, G., Davis, Z. J., Borrise, X., Hansen, O., Boisen, A., Barniol, N., Perez-Murano, F. & Serra, F., 2003, In : Ultramicroscopy. 97, 1-4, p. 127-133

Research output: Contribution to journalJournal articleResearchpeer-review

Batch Fabrication of Through-Wafer Vias In CMOS Wafers for 3-D Packaging Applications

Rasmussen, F. E., Heschel, M. & Hansen, O., 2003, Proceedings of the 53rd Electronic Components and Technology Conference (ECTC). p. 634-639

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
255 Downloads (Pure)

Batch Processing of CMOS Compatible Feedthroughs

Rasmussen, F. E., Heschel, M. & Hansen, O., Jun 2003, In : Microelectronic Engineering. 67-68, p. 487-494

Research output: Contribution to journalConference articleResearchpeer-review

CMOS integrated nickelelectroplated comb-drive resonators

Yalcinkaya, A. D. & Hansen, O., 2003, Proceedings of the Nordic Semiconductor Meeting Paper 1037.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Deep Reactive Ion Etching for High Aspect Ratio Microelectromechanical Components

Jensen, S., Yalcinkaya, A. D., Jacobsen, S., Rasmussen, T., Rasmussen, F. E. & Hansen, O., 2003, Nordic Semiconductor Meeting Paper 1040. Tampere, Finland

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Development and Characterisation of KOH Resistant PECVD Silicon Nitride for Microsystems Applications

Rasmussen, F. E., Geilman, B., Heschel, M., Hansen, O. & Jørgensen, A. M., 2003, Proceedings of the International Symposium on Dielectrics in Emerging Technologies. p. 218-229

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Fabrication of High Aspect Ratio Through-Wafer Vias in CMOS Wafers for 3-D Packaging Applications

Rasmussen, F. E., Frech, J., Heschel, M. & Hansen, O., 2003, Proceedings of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). IEEE, Vol. 2. p. 1659-1662

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
254 Downloads (Pure)

FLEXIBLE STRUCTURE WITH INTEGRATED SENSOR/ACTUATOR

Thaysen, J., Hansen, O., Menon, A. K. & Boisen, A., 2003, Patent No. WO2003022731

Research output: Patent

High aspect ratio MEMS capacitor for high frequency impedance matching applications

Yalcinkaya, A. D., Jensen, S. & Hansen, O., 2003, Proceedings of the 2003 10th IEEE International Conference on Electronics, Circuits and Systems, 2003. ICECS 2003.. IEEE, Vol. 2.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

Open Access
File
358 Downloads (Pure)

Low Voltage, High-Q SOI MEMS Varactors for RF Applications

Yalcinkaya, A. D., Jensen, S. & Hansen, O., 2003, Proceedings of the 29th EuropeanSolid-State Circuits Conference (ESSCIRC). IEEE

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
287 Downloads (Pure)

MEMS device for bending test: measurements of fatigue and creep of electroplated nickel

Larsen, K. P., Rasmussen, A. A., Ravnkilde, J. T., Ginnerup, M. & Hansen, O., 2003, In : Sensors and Actuators A: Physical. 103, 1-2, p. 156-164

Research output: Contribution to journalJournal articleResearchpeer-review

Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Davis, Z. J., Abadal, G., Helbo, B., Hansen, O., Campabadal, F., Perez-Murano, F., Esteve, J., Figueras, E., Verd, J., Barniol, N. & Boisen, A., 2003, In : Sensors and Actuators A-physical. 105, 3, p. 311-319

Research output: Contribution to journalJournal articleResearchpeer-review

Optimised cantilever biosensor with piezoresistive read-out

Rasmussen, P., Thaysen, J., Hansen, O., Eriksen, S. C. & Boisen, A., 2003, In : Ultramicroscopy. 97, 1-4, p. 371-376

Research output: Contribution to journalConference articleResearchpeer-review

Photolithographic patterning of porous catalyst in microstructures

Quaade, U. J., Thybo, S., Jensen, S., Johansen, J., Johannessen, T. & Hansen, O., 2003, Proceedings of the 7th International Conference on Microreaction Technology (IMRET 7).

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Resolution enhancement of scanning four-point-probe measurements on two-dimensional systems.

Hansen, T. M., Stokbro, K., Hansen, O., Hassenkam, T., Shiraki, I., Hasegawa, S. & Bøggild, P., 2003, In : Review of Scientific Instruments. 74, 8, p. 3701-3708

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
272 Downloads (Pure)

SOI silicon on glass for optical MEMS

Larsen, K. P., Ravnkilde, J. T. & Hansen, O., 2003, Proceedings of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). IEEE, p. 1655-1658

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
613 Downloads (Pure)
2002

AFM characterization of a resonating nanocantilever

Pérez-Murano, F., Davis, Z. J., Abadal, G., Hansen, O., Borrisé, X. & Boisen, A., 2002, Proceedings of Nano-7/Ecoss-21.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review