1992 …2022

Research output per year

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Research Output

2010

Sensitivity study of micro four-point probe measurements on small samples

Wang, F., Petersen, D. H., Hansen, T. M., Henriksen, T. R., Bøggild, P. & Hansen, O., 2010, In : Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures. 28, 1C, p. 34-40

Research output: Contribution to journalJournal articleResearchpeer-review

Silicon microreactors for measurements of catalytic activity

Henriksen, T. R. & Hansen, O., Jun 2010, Kgs. Lyngby, Denmark: Technical University of Denmark. 110 p.

Research output: Book/ReportPh.D. thesis

Open Access
File
372 Downloads (Pure)

Study of submelt laser induced junction nonuniformities using Therma-Probe

Rosseel, E., Bogdanowicz, J., Clarysse, T., Vandervoorst, W., Ortolland, C., Hoffmann, T., Salnik, A., Nicolaides, L., Han, S. H., Petersen, D. H., Lin, R. & Hansen, O., 2010, In : Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures. 28, 1C, p. 21-25

Research output: Contribution to journalJournal articleResearchpeer-review

Submicron organic nanofiber devices with different anode-cathode materials: A simple approach

Henrichsen, H. H., Sturm, H., Bøggild, P. & Hansen, O., 2010, In : Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures. 28, 3, p. 617-622

Research output: Contribution to journalJournal articleResearchpeer-review

Towards hot electron mediated charge exchange in hyperthermal energy ion-surface interactions

Ray, M. P., Lake, R. E., Thomsen, L. B., Nielsen, G., Hansen, O., Chorkendorff, I. & Sosolik, C. E., 2010, In : Journal of Physics: Condensed Matter. 22, 8, p. 84010

Research output: Contribution to journalJournal articleResearchpeer-review

2009

Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study

Wang, F., Petersen, D. H., Østerberg, F. W. & Hansen, O., 2009, 17th International Conference on Advanced Thermal Processing of Semiconductors, 2009. RTP '09. IEEE, p. 1-6

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
239 Downloads (Pure)

Accurate microfour-point probe sheet resistance measurements on small samples

Thorsteinsson, S., Wang, F., Petersen, D. H., Hansen, T. M., Kjær, D., Lin, R., Kim, J-Y., Nielsen, P. F. & Hansen, O., 2009, In : Review of Scientific Instruments. 80, 5, p. 053902

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
1067 Downloads (Pure)

Accurate micro Hall effect measurements on scribe line pads

Østerberg, F. W., Petersen, D. H., Wang, F., Rosseel, E., Vandervorst, W. & Hansen, O., 2009, 17th IEEE International conference on Advanced Thermal Processing of Semiconductors, RTP09. IEEE, p. 157-162

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
361 Downloads (Pure)

Activation of ion implanted Si for backside processing by Ultra-fast Laser Thermal Annealing: Energy homogeneity and micro-scale sheet resistance

Huet, K., Lin, R., Boniface, C., Desse, F., Petersen, D. H., Hansen, O., Variam, N., La Magna, A., Schuhmacher, M., Jensen, A., Nielsen, P. F., Besaucele, H. & Venturini, J., 2009, 17th International Conference on Advanced Thermal Processing of Semiconductors, 2009. RTP '09.. IEEE, p. 1-19

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

All-Optical Frequency Modulated MEMS Strain Sensor Using Nanoscale Braggs Grating

Reck, K., Almind, N. S., Mar, M. D., Hübner, J., Hansen, O. & Thomsen, E. V., 2009, All-Optical Frequency Modulated MEMS Strain Sensor Using Nanoscale Braggs Grating.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Analytical Model of a PZT Thick-Film Triaxial Accelerometer for Optimum Design

Hindrichsen, C. C., Almind, N. S., Brodersen, S. H., Hansen, O. & Thomsen, E. V., 2009, In : IEEE Sensors Journal. 9, 4, p. 419-429

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
554 Downloads (Pure)

Batch chemical microreactors: Reversible, in-situ UHV sealing of a microcavity

Monkowski, A., Johansson, M., Nielsen, J. H., Chorkendorff, I. & Hansen, O., 2009, In : Microelectronic Engineering. 86, 4-6, p. 1389-1392

Research output: Contribution to journalConference articleResearchpeer-review

Correlation of Effective Dispersive and Polar Surface Energies in Heterogeneous Self-Assembled Monolayer Coatings

Zhuang, Y. & Hansen, O., 2009, In : Langmuir. 25, 10, p. 5437-5441

Research output: Contribution to journalJournal articleResearchpeer-review

Design and modeling of an all-optical frequency modulated MEMS strain sensor using nanoscale Bragg gratings

Reck, K., Almind, N. S., Mar, M. D., Hübner, J., Hansen, O. & Thomsen, E. V., 2009, In : I E E E Sensors. Proceedings. p. 873-877

Research output: Contribution to journalConference articleResearchpeer-review

Open Access
File
283 Downloads (Pure)

Electrical characterization of InGaAs ultra-shallow junctions

Petersen, D. H., Hansen, O., Bøggild, P., Lin, R., Nielsen, P. F., Lin, D., Adelmann, C., Alian, A., Merckling, C., Penaud, J., Brammertz, G., Goossens, J., Vandervorst, W. & Clarysse, T., 2009.

Research output: Contribution to conferencePosterResearchpeer-review

Electron emission from MOS electron emitters with clean and cesium covered gold surface

Nielsen, G., Thomsen, L. B., Johansson, M., Hansen, O. & Chorkendorff, I., 2009, In : Applied Surface Science. 255, 17, p. 7657-7662

Research output: Contribution to journalJournal articleResearchpeer-review

Electron Emission from Ultra-Large Area MOS Electron Emitters

Thomsen, L. B., Nielsen, G., Vendelbo, S. B., Johansson, M., Hansen, O. & Chorkendorff, I., 2009, In : Journal of Vacuum Science & Technology B. 27, 2, p. 562-567

Research output: Contribution to journalJournal articleResearchpeer-review

Fundamental size limitations of micro four-point probes

Ansbæk, T., Petersen, D. H., Hansen, O., Larsen, J. B., Hansen, T. M. & Bøggild, P., 2009, In : Microelectronic Engineering. 86, 4-6, p. 987-990

Research output: Contribution to journalJournal articleResearchpeer-review

Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

Pedersen, T., Fragiacomo, G., Hansen, O. & Thomsen, E. V., 2009, In : Sensors and Actuators A: Physical. 154, 1, p. 35-41

Research output: Contribution to journalJournal articleResearchpeer-review

Highly sensitive silicon microreactor for catalyst testing

Henriksen, T. R., Olsen, J. L., Vesborg, P. C. K., Chorkendorff, I. & Hansen, O., 2009, In : Review of Scientific Instruments. 80, 12, p. 124101

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
439 Downloads (Pure)

Monitoring of local and global temperature non-uniformities by means of Therma-Prope metrology

Rosseel, E., Petersen, D. H., Østerberg, F. W., Hansen, O., Bogdanowicz, J., Clarysse, T., Vandervorst, W., Ortolland, C., Hoffmann, T., Chan, P., Salnik, A. & Nicolaides, L., 2009, Monitoring of local and global temperature non-uniformities by means of Therma-Prope metrology.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Sensivity study of micro four-point probe measurements on small samples

Wang, F., Petersen, D. H., Hansen, T. M., Henriksen, T. R., Bøggild, P. & Hansen, O., 2009.

Research output: Contribution to conferencePosterResearchpeer-review

Spatial and temporal changes in the morphology of preosteoblastic cells seeded on microstructured tantalum surfaces

Justesen, J., Lorentzen, M., Andersen, L. K., Hansen, O., Chevallier, J., Modin, C., Fuchtbauer, A., Foss, M., Besenbacher, F., Duch, M. & Pedersen, F. S., 2009, In : Journal of Biomedical Materials Research. Part A. 89A, 4, p. 885-894

Research output: Contribution to journalJournal articleResearchpeer-review

Subsurface excitations in a metal

Ray, M. P., Lake, R. E., Sosolik, C. E., Thomsen, L. B., Nielsen, G., Chorkendorff, I. & Hansen, O., 2009, In : Physical Review B Condensed Matter. 80, 16, p. 161405

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
218 Downloads (Pure)
2008

A compact system for large-area thermal nanoimprint lithography using smart stamps

Pedersen, R. H., Hansen, O. & Kristensen, A., 2008, In : Journal of Micromechanics and Microengineering. 18, 5, p. 055018

Research output: Contribution to journalJournal articleResearchpeer-review

Anisotropic Porous Silicon Etching applied to the Fabrication of BSG Cantilevers

Teva, J., Davis, Z. J. & Hansen, O., 2008.

Research output: Contribution to conferencePosterResearchpeer-review

Autonomous multi-sensor micro-system for measurement of ocean water salinity

Hyldgård, A., Mortensen, D., Birkelund, K., Hansen, O. & Thomsen, E. V., 2008, In : Sensors and Actuators A: Physical. 147, 2, p. 474-484

Research output: Contribution to journalJournal articleResearchpeer-review

Determination of Stress Build-up during Nanoimprint process in Triangular Polymer Structures

Fernandez-Cuesta, I., Borrise, X., Retolaza, A., Merino, S., Mendels, D. A., Hansen, O., Kristensen, A. & Perez-Murano, F., 2008, In : Microelectronic Engineering. 85, 5-6, p. 838-841

Research output: Contribution to journalJournal articleResearchpeer-review

Easy Manufacturing of Compact SIDM Based Motor

Rasmussen, T., Hansen, O., Thomsen, E. V., Sommer-Larsen, P., Uchino, K., Ural, S. & Tuncdemir, S., 2008, Proceeding of Actuator 2008, 11th international Conference on new Actuators. Bremen, Germany: HVG Publishing House, p. 644-647

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Engineering piezoresistivity using biaxially strained silicon

Pedersen, J. G., Richter, J., Brandbyge, M., Thomsen, E. V. & Hansen, O., 2008, In : Applied Physics Letters. 93, 26, p. 263501

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
186 Downloads (Pure)

Fast thermal nanoimprint lithography by a stamp with integrated heater

Tormen, M., Malureanu, R., Pedersen, R. H., Lorenzen, L. V., Rasmussen, K. H., Lüscher, C. J., Kristensen, A. & Hansen, O., 2008, In : Microelectronic Engineering. 85, 5-6, p. 1229-1232

Research output: Contribution to journalConference articleResearchpeer-review

Four point bending setup for characterization of semiconductor piezoresistance

Richter, J., Arnoldus, M. B., Hansen, O. & Thomsen, E. V., 2008, In : Review of Scientific Instruments. 79, 4, p. 044703

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
812 Downloads (Pure)

Fundamental Size Limitation of Micro Four-Point Probes

Ansbæk, T., Petersen, D. H., Hansen, O., Larsen, J. B. & Hansen, T. M., 2008.

Research output: Contribution to conferencePosterResearchpeer-review

Giant Geometrically Amplified Piezoresistance in Metal-Semiconductor Hybrid Resistors

Hansen, O., Reck, K. & Thomsen, E. V., 2008, In : Journal of Applied Physics. 104, 11, p. 114510

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
160 Downloads (Pure)

Growth and Properties of Self-Assembled Monolayers on Metals

Zhuang, Y. & Hansen, O., 2008, Proceeding of "MRS meeting Chongqing".

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

High precision micro-scale Hall Effect characterization method using in-line micro four-point probes

Petersen, D. H., Hansen, O., Lin, R., Nielsen, P. F., Clarysse, T., Goossens, J., Rosseel, E. & Vandervorst, W., 2008, Proceeding of "IEEE". IEEE, p. 251-256

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
223 Downloads (Pure)

Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions

Rosseel, E., Vandervorst, W., Clarysse, T., Goossens, J., Moussa, A., Lin, R., Petersen, D. H., Nielsen, P. F., Hansen, O., Bennett, N. S. & Cowern, N. E. B., 2008, Proceedings of the 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors. IEEE, p. 135-140

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Increased piezoresistive effect in crystalline and polycrystalline Si nanowires

Reck, K., Richter, J., Hansen, O. & Thomsen, E. V., 2008, Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show. p. 920-923

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Measurement of the Resonant Frequency of Nano-Scale Cantilevers by Hard Contact Readout

Dohn, S., Hansen, O. & Bolsen, A., 2008, In : Microelectronic Engineering. 85, 5-6, p. 1390-1394

Research output: Contribution to journalJournal articleResearchpeer-review

Micro-four-point Probe Hall effect Measurement method

Petersen, D. H., Hansen, O., Lin, R. & Nielsen, P. F., 2008, In : Journal of Applied Physics. 104, 1, p. 013710

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
1932 Downloads (Pure)

On the analysis of the activation mechanisms of sub-melt laser anneals

Clarysse, T., Bogdanowicz, J., Goosens, J., Moussa, A., Rosseel, E., Vandervorst, W., Petersen, D. H., Lin, R., Nielsen, P. F., Hansen, O., Merklin, G., Bennett, N. S. & Cowern, N. E. B., 2008, In : Materials Science & Engineering: B. Solid-state Materials for Advanced Technology. 154-155, 5, p. 24-30

Research output: Contribution to journalConference articleResearchpeer-review

Parametric Investigation of Rate Enhancement during fast Temperature Cycling of CO Oxidation in Microreactors

Jensen, S., Thorsteinsson, S., Hansen, O. & Quaade, U., 2008, In : Chemical Engineering Journal. 135, S1, p. S237-S241

Research output: Contribution to journalJournal articleResearchpeer-review

Piezoresistance in p-type silicon revisited

Richter, J., Pedersen, J., Brandbyge, M., Thomsen, E. V. & Hansen, O., 2008, In : Journal of Applied Physics. 104, 2, p. 023715

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
227 Downloads (Pure)

Piezoresistive effect in top-down fabricated silicon nanowires

Reck, K., Richter, J., Hansen, O. & Thomsen, E. V., 2008, IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008. MEMS 2008.. IEEE

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
452 Downloads (Pure)

Reduction of Hysteresis in Capacitive Pressure Sensors

Reck, K., Richter, J., Hansen, O. & Thomsen, E. V., 2008, Technical Proceedings of the 2008 Nanotechnology Conference and Trade Show. Nano Science and Technology Institute - NSTI, p. 920-923

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Reduction of Hysteresis in Capacitive Pressure Sensors

Reck, K., Richter, J., Hansen, O. & Thomsen, E. V., 2008.

Research output: Contribution to conferencePosterResearchpeer-review

Reduction of Hysteresis in Capacitive Pressure Sensors

Pedersen, T., Hansen, O. & Thomsen, E. V., 2008, Proceedings of the conference EUROSENSORS XXII. VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik, p. 165-168

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Short-Cycle Thermal Nanoimprint using Smart Stamps

Pedersen, R. H., Rasmussen, K. H., Lorenzen, L. V., Lüscher, C. J., Hansen, O. & Kristensen, A., 2008, Proceeding of The 7th International Conference on Nanoimprint and Nanoprint Technology: NNT'08 October 13-15 2008.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Short-Cycle Thermal Nanoimprint using Smart Stamps

Pedersen, R. H., Rasmussen, K. H., Lorenzen, L. V., Lüscher, C. J., Hansen, O. & Kristensen, A., 2008, Proceeding of 34th International Conference on Micro and Nano Engineering: MNE 2008 15-18 September 2008. Athens, Greece

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Short-Cycle Thermal Nanoimprint using Smart Stamps

Pedersen, R. H., Rasmussen, K. H., Lorenzen, I. V., Lüscher, C. J., Hansen, O. & Kristensen, A., 2008.

Research output: Contribution to conferencePosterResearchpeer-review