1992 …2022

Research output per year

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Research Output

1997

Cold-walled UHV/CVD batch reactor for the growth of Si1_x/Gex layers

Thomsen, E. V., Christensen, C., Andersen, C. R., Pedersen, E. V., Egginton, P. N., Hansen, O. & Petersen, J. W., 1997, In : Thin Solid Films. 294, 1-2, p. 72-75

Research output: Contribution to journalJournal articleResearchpeer-review

Fabrication of an all-metal atomic force microscope probe

Rasmussen, J. P., Tang, P. T., Hansen, O., Møller, P. & Sander, C., 1997, Proceedings of Transducers 97. Chicago: IEEE, Vol. 1. p. 463-466

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
389 Downloads (Pure)

Microdevices by Metal Plating

Hansen, O., Rasmussen, J. P. & Ravnkilde, J. T., 1997, MMC/MIC Seminar on Micromachines. Lyngby: MIC, p. 43-49

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

MICROMECHANICAL MICROPHONE

Bay, J., Bouwstra, S. & Hansen, O., 1997, Patent No. WO1997001258, 1 Sep 1997

Research output: Patent

New approaches to atomic force microscope lithography on silicon

Birkelund, K., Thomsen, E. V., Rasmussen, J. P., Hansen, O., Tang, P. T., Møller, P. & Grey, F., 1997, In : Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures. 15, 6, p. 2912-2915

Research output: Contribution to journalJournal articleResearchpeer-review

Organotypic slice cultures grown on silicon-based arrays of electrodes

Jahnsen, H. & Hansen, O., 1997, Society for Neuro-science, 27th Annual meeting. p. 20-20

Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

Quasistatic analysis of square dia-phragms and capacitive microphones using finite element calculation

Bay, J., Hansen, O. & Bouwstra, S., 1997, MME '97. p. 242-245

Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

Quasistatic analysis of square diaphragms and capacitive microphones using finite lelement calculation

Bay, J., Hansen, O. & Bouwstra, S., 1997, Proceedings MME'97. Southampton, p. 242-236

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Selvevaluering af elektro-civilingeniøruddannelsen ved DTU

Bruun, E. (ed.), Bruun, E., Galster, G., Hansen, O., Kirkegaard, J., Knudsen, B., Madsen, K., Nielsen, L. D., Smedsgaard, H., Sørensen, P. H. & Wätjen, R., 1997

Research output: Book/ReportReport

Spatial variation of the etch rate for deep etching of silicon by reactive ion etching

Andersen, B. A. M., Hansen, O. & Kristensen, M., 1997, In : Journal of Vacuum Science & Technology B. 15, 4, p. 993-999

Research output: Contribution to journalJournal articleResearchpeer-review

1996

A CONTROLLABLE MICROSWITCH, A METHOD OF MAKING IT, AND USE OF SUCH A MICROSWITCH

Pinholt, P. & Hansen, O., 1996, Patent No. WO1996038850, 5 Dec 1996

Research output: Patent

AFM probes with directly fabricated tips

Boisen, A., Hansen, O. & Bouwstra, S., 1996, In : Journal of Micromechanics and Microengineering. 6, p. 58-62

Research output: Contribution to journalJournal articleResearchpeer-review

Design of a silicon microphone with differential read-out of a sealed double parallel-plate capacitor

Bay, J., Hansen, O. & Bouwstra, S., 1996, In : Sensors and Actuators A: Physical. 53, p. 232-236

Research output: Contribution to journalJournal articleResearchpeer-review

Indirect tip fabrication for scanning probe microscopy

Boisen, A., Rasmussen, J. P., Hansen, O. & Bouwstra, S., 1996, In : Microelectronic Engineering. 30, p. 579-582

Research output: Contribution to journalJournal articleResearchpeer-review

The diagonal and off-diagonal AC conductivity of two-dimensional electron gases with contactless Corbino geometry in the quantum Hall regime

Petersen, C. L. & Hansen, O. P., 1996, In : Journal of Applied Physics. 80, 8, p. 4479-4483

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
316 Downloads (Pure)
1994

Terahertz radiation from delta-doped GaAs

Birkedal, D., Hansen, O., Sørensen, C. B., Jarasiunas, K., Brorson, S. D. & Keiding, S. R., 1994, In : Applied Physics Letters. 65, 1, p. 79-81

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
206 Downloads (Pure)