1992 …2022

Research output per year

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Research Output

Article in proceedings

Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study

Wang, F., Petersen, D. H., Østerberg, F. W. & Hansen, O., 2009, 17th International Conference on Advanced Thermal Processing of Semiconductors, 2009. RTP '09. IEEE, p. 1-6

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
239 Downloads (Pure)

Accurate micro Hall effect measurements on scribe line pads

Østerberg, F. W., Petersen, D. H., Wang, F., Rosseel, E., Vandervorst, W. & Hansen, O., 2009, 17th IEEE International conference on Advanced Thermal Processing of Semiconductors, RTP09. IEEE, p. 157-162

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
361 Downloads (Pure)

AFM characterization of a resonating nanocantilever

Pérez-Murano, F., Davis, Z. J., Abadal, G., Hansen, O., Borrisé, X. & Boisen, A., 2002, Proceedings of Nano-7/Ecoss-21.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

AFM probe with piezoresistive read-out and highly symmetrical wheatstone bridge arrangement.

Thaysen, J., Boisen, A., Hansen, O. & Bouwstra, S., 1999, AFM probe with piezoresistive read-out and highly symmetrical wheatstone bridge arrangement.. The Institute of Electrical Engineers of Japan, p. 1852-1855

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

A High Aspect Ratio, Low Voltage Tunable RF Capacitor

Yalcinkaya, A. D., Jensen, S. & Hansen, O., 2003, Proceedings of the 17th European Conference on Solid-State Tranducers (Eurosensors). p. 434-437

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

All-Optical Frequency Modulated MEMS Strain Sensor Using Nanoscale Braggs Grating

Reck, K., Almind, N. S., Mar, M. D., Hübner, J., Hansen, O. & Thomsen, E. V., 2009, All-Optical Frequency Modulated MEMS Strain Sensor Using Nanoscale Braggs Grating.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

A Low-Power CMOS Interface Chip for Data Logging Applications

Wismar, U. S., Yalcinkaya, A. D. & Hansen, O., 2003, Proceedings of the A Low-Power CMOS Interface Chip for Data Logging Applications. p. 831-834

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

A Polymer-Metal Composite Surface Stress Sensor

Thaysen, J., Hansen, O. & Menon, A. K., 2002, Proceedings of the 17th Annual Technical Conference of the American Society for Composites Purdue.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Balanced Membrane Micromachined Loudspeaker for Hearing Instrument Application

Rehder, J., Rombach, P. & Hansen, O., 2000, MME’00. Uppsala, Finland

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Batch Fabrication of Through-Wafer Vias In CMOS Wafers for 3-D Packaging Applications

Rasmussen, F. E., Heschel, M. & Hansen, O., 2003, Proceedings of the 53rd Electronic Components and Technology Conference (ECTC). p. 634-639

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
255 Downloads (Pure)

Bio-inspired co-catalysts bonded to a silicon photocathode for solar hydrogen evolution

Hou, Y., Abrams, B., Vesborg, P. C. K., Björketun, M., Herbst, K., Bech, L., Seger, B., Pedersen, T., Hansen, O., Rossmeisl, J., Dahl, S., Nørskov, J. K. & Chorkendorff, I., 2011, Proceedings of SPIE. Tachibana, Y. (ed.). SPIE - International Society for Optical Engineering, Vol. 8109.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Black Silicon realized by reactive ion etching (ICP) without platen power

Davidsen, R. S., Nery, A. P. S., Iandolo, B. & Hansen, O., 2018, 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC & 34th EU PVSEC). IEEE, 4 p.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
206 Downloads (Pure)

Black silicon solar cells with black bus-bar strings

Davidsen, R. S., Tang, P. T., Mizushima, I., Thorsteinsson, S., Poulsen, P. B., Frausig, J., Nordseth, O. & Hansen, O., 2017, 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC). IEEE, p. 2885-2888 4 p.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Black silicon solar cells with black bus-bar strings

Davidsen, R. S., Tang, P. T., Mizushima, I., Thorsteinsson, S., Poulsen, P. B., Frausig, J., Nordseth, Ø. & Hansen, O., 2016, Proceedings of 43rd IEEE Photovoltaic Specialists Conference. IEEE, p. 2885-2888 4 p. 7750183

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Black Silicon Solar Cells with Black Ribbons.

Davidsen, R. S., Tang, P. T., Mizushima, I., Thorsteinsson, S., Poulsen, P. B., Frausig, J., Nordseth, Ø. & Hansen, O., 2016, Proceedings of the EU PVSEC 2016. 4 p.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Black silicon with black bus-bar strings

Davidsen, R. S., Tang, P. T., Mizushima, I., Thorsteinsson, S., Poulsen, P. B., Frausig, J., Nordseth, Ø. & Hansen, O., 2016, Proceedings of Norwegian Solar Cell Conference 2016. 1 p.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Black silicon with tunnel oxide passivated contacts

Kloster, M. E., Witthøft, M-L., Shearer, D. C., Hajijafarassar, A., Davidsen, R. S., Petersen, D. H., Hansen, O. & Iandolo, B., 2018, Proceedings of the 35th European Photovoltaic Solar Energy Conference and Exhibition. p. 668-671

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
108 Downloads (Pure)

Breakthrough In Current In Plane Metrology For Monitoring Large Scale MRAM Production

Cagliani, A., Østerberg, F. W., Hansen, O., Petersen, D. H., Shiv, L. & Nielsen, P. F., 2017, 2017 IEEE International Memory Workshop (IMW). IEEE, p. 169-171 3 p.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Cantilever Biosensor with Integrated Read-out Optimised for Operation in Liquid

Rasmussen, P., Thaysen, J., Hansen, O., Eriksen, S. C. & Boisen, A., 2002, Proceedings of Eurosensors XVI. p. 705-706

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Cantilever readout by hard contact

Dohn, S., Hansen, O. & Boisen, A., 2006, Micro and Nano Engineering 2006 International Conference. p. 399-400

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Characterization of the Microloading Effect in Deep Reactive Ion Etching of Silicon

Jensen, S. & Hansen, O., 2004, Proceedings of the SPIE International Symposium on Micromachining and Microfabrication. Vol. 5342. p. 111-118

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

CMOS integrated nickelelectroplated comb-drive resonators

Yalcinkaya, A. D. & Hansen, O., 2003, Proceedings of the Nordic Semiconductor Meeting Paper 1037.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Concentration changes due to thermal diffusion effects in gas flow micro-systems with temperature gradients

Quaade, U., Johannessen, T., Jensen, S. & Hansen, O., 2004, Proceedings of the 8th International Conference on Miniaturized Systems for Chemistry and Life sciences. Vol. 1. p. 216-218

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Corrosion resistant capacitive pressure sensor

Pedersen, T., Hansen, O. & Thomsen, E. V., 2006, Proceedings of Eurocensors XX. Göteborg, Sweden, p. 68-69

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Deep Reactive Ion Etching for High Aspect Ratio Microelectromechanical Components

Jensen, S., Yalcinkaya, A. D., Jacobsen, S., Rasmussen, T., Rasmussen, F. E. & Hansen, O., 2003, Nordic Semiconductor Meeting Paper 1040. Tampere, Finland

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Determination of packaging induced 3D stress utilizing a piezocoefficient mapping device

Richter, J., Hyldgård, A., Birkelund, K., Arnoldus, M. B., Hansen, O. & Thomsen, E. V., 2007, 20th IEEE International Micro Electro Mechanical Systems (MEMS) Conference. IEEE, p. 69-72

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
182 Downloads (Pure)

Development and Characterisation of KOH Resistant PECVD Silicon Nitride for Microsystems Applications

Rasmussen, F. E., Geilman, B., Heschel, M., Hansen, O. & Jørgensen, A. M., 2003, Proceedings of the International Symposium on Dielectrics in Emerging Technologies. p. 218-229

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Devices for fatigue testing of electroplated nickel (MEMS)

Larsen, K. P., Ravnkilde, J. T., Ginnerup, M. & Hansen, O., 2002, The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002.. IEEE, p. 443-446

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
295 Downloads (Pure)

Diffusion of phosphorous in black silicon

Stilling-Andersen, A. R., Solodovnikova, O., Davidsen, R. S., Hansen, O. & Iandolo, B., 2018, 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC & 34th EU PVSEC). IEEE, 4 p.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
173 Downloads (Pure)

Dry Etch Black Silicon with Low Surface Damage: Effect of Low Capacitively Coupled Plasma Power

Iandolo, B., Plakhotnyuk, M., Gaudig, M., Davidsen, R. S., Lausch, D. & Hansen, O., 2017, Proceedings of the 33rd European Photovoltaic Solar Energy Conference and Exhibition. p. 841-843

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates

Smistrup, K., Nørregaard, J., Mironov, A., Bro, T. H., Bilenberg, B., Hansen, O., Khan, F., Emanuel, M., Ma, Y., Zhang, Y., Kristensen, A., Rishton, S. & Nielsen, T., 2013, Proceedings of the 39th International Conference on Micro and Nano Engineering.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Easy Manufacturing of Compact SIDM Based Motor

Rasmussen, T., Hansen, O., Thomsen, E. V., Sommer-Larsen, P., Uchino, K., Ural, S. & Tuncdemir, S., 2008, Proceeding of Actuator 2008, 11th international Conference on new Actuators. Bremen, Germany: HVG Publishing House, p. 644-647

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Effect of B+ Flux on the electrical activation of ultra-shallow B+ implants in Ge

Yates, B. R., Darby, B. L., Petersen, D. H., Hansen, O., Lin, R., Nielsen, P. F., Doyle, B. L., Kontos, A. & Jones, K. S., 2012, ECS Transactions. The Electrochemical Society, p. 543-549

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
253 Downloads (Pure)

Effect of Time and Micropatterns on the Behaviour of Preosteoblastic Cells

Justesen, J., Andersen, L. K., Cantera Antoranz, S., Duch, M., Hansen, O., Lorentzen, M., Chevallier, J., Foss, M., Pedersen, F. S. & Besenbacher, F., 2004, Proceedings of the 7th World Biomaterials Congress.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Elecroplating and characterization of cobalt-nickel-iron for magnetic microsystems applications.

Rasmussen, F. E., Ravnkilde, J. T., Tang, P. T., Hansen, O. & Bouwstra, S., 2000, EuroSensors. Elsevier, 7 p.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Electroplated Ni Comb accelerometers for CMOS post processing.

Johansen, L. S., Ravnkilde, J. T., Yalcinkaya, A. D. & Hansen, O., 1999, Electroplated Ni Comb accelerometers for CMOS post processing.. p. 409-410

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Electrostatic energy harvesting device with out-of-plane gap closing scheme

Hansen, O. & Wang, F., 2013, Proceedings of the The 17th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, p. 2237-2240

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Electrostatic energy harvesting device with out-of-the-plane gap closing scheme

Wang, F. & Hansen, O., 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, p. 2237-2240 4 p.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Emission and Absorption Entropy Generation in Semiconductors

Reck, K., Varpula, A., Prunnila, M. & Hansen, O., 2013, Proceedings of the 28th European Photovoltaic Solar Energy Conference and Exhibition. p. 20-23

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

File
275 Downloads (Pure)

Excitation of plasmon modes in a graphene monolayer supported on a 2D subwavelength silicon grating

Zhu, X., Yan, W., Jepsen, P. U., Hansen, O., Mortensen, N. A. & Xiao, S., 2013, Proceedings of CLEO Europe 2013. IEEE, p. 1 1 p.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Fabrication and characterization of Flexible Silicon Substrates with Electroplated Leads

Lisby, T., Hansen, O. & Branebjerg, J., 2002, Proceedings of the Institute of Electrical and Electronics Engineers Sensors conference (IEEE). p. 568-571

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Fabrication of an all-metal atomic force microscope probe

Rasmussen, J. P., Tang, P. T., Hansen, O., Møller, P. & Sander, C., 1997, Proceedings of Transducers 97. Chicago: IEEE, Vol. 1. p. 463-466

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
389 Downloads (Pure)

Fabrication of electroplated nickel micromechanical resonators.

Ravnkilde, J. T., Yalcinkaya, A. D., Johansen, L. S. & Hansen, O., 1999, Fabrication of electroplated nickel micromechanical resonators.. Academic Press

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

Fabrication of High Aspect Ratio Through-Wafer Vias in CMOS Wafers for 3-D Packaging Applications

Rasmussen, F. E., Frech, J., Heschel, M. & Hansen, O., 2003, Proceedings of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). IEEE, Vol. 2. p. 1659-1662

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
254 Downloads (Pure)

Fabrication of Microcomponents by Electrochemical Manufacturing: Advanced Feed-Through Metallisation on Silicon and Nickel Micromechanical Resonators

Tang, P. T., Heschel, M., Ravnkilde, J. T., Hansen, O., Møller, P. & Alting, L., 2000, 1st euspen topical conference on Fabrication and Metrology in Nanotechnology. IPL

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Fast gas sampling with integrated capillary leak on silicon fabricated microreactors

Quaade, U. J., Jensen, S. & Hansen, O., 2005, Proceedings of the 19th North American Catalysis Society Meeting. May 22-27.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

FISH & CHIPS: Four Electrode Conductivity / Salinity Sensor on a Silicon Multi-sensor chip for Fisheries Research

Hyldgård, A., Olafsdottir, I., Olesen, M., Hedegaard, T., Hansen, O. & Thomsen, E. V., 2005, Proceedings of IEEE sensors 2005. IEEE

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
258 Downloads (Pure)

FISH & CHIPS: Single Chip Silicon MEMS CTDL Salinity, Temperature, Pressure and Light sensor for use in fisheries research

Hyldgård, A., Hansen, O. & Thomsen, E. V., 2005, Proceedings of MEMS 2005. IEEE, p. 303-306

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
199 Downloads (Pure)

Flexible silicon substrates with Cu leads and BCB dielectric

Lisby, T., Hansen, O. & Branebjerg, J., 2002, Proceedings of Eurosensors XVI. p. 153-154

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Flexible Stamp for Homegenous Large Area Thermal NIL

Nielsen, T., Pedersen, R. H., Hansen, O., Haatainen, T., Tollki, A., Ahopelto, J. & Kristensen, A., 2004, Proceedings of the Third International Conference on Nanoimprint and Nanoprint Technology (NNT).

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review