1992 …2022

Research output per year

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Research Output

1994

Terahertz radiation from delta-doped GaAs

Birkedal, D., Hansen, O., Sørensen, C. B., Jarasiunas, K., Brorson, S. D. & Keiding, S. R., 1994, In : Applied Physics Letters. 65, 1, p. 79-81

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
206 Downloads (Pure)
1996

A CONTROLLABLE MICROSWITCH, A METHOD OF MAKING IT, AND USE OF SUCH A MICROSWITCH

Pinholt, P. & Hansen, O., 1996, Patent No. WO1996038850, 5 Dec 1996

Research output: Patent

AFM probes with directly fabricated tips

Boisen, A., Hansen, O. & Bouwstra, S., 1996, In : Journal of Micromechanics and Microengineering. 6, p. 58-62

Research output: Contribution to journalJournal articleResearchpeer-review

Design of a silicon microphone with differential read-out of a sealed double parallel-plate capacitor

Bay, J., Hansen, O. & Bouwstra, S., 1996, In : Sensors and Actuators A: Physical. 53, p. 232-236

Research output: Contribution to journalJournal articleResearchpeer-review

Indirect tip fabrication for scanning probe microscopy

Boisen, A., Rasmussen, J. P., Hansen, O. & Bouwstra, S., 1996, In : Microelectronic Engineering. 30, p. 579-582

Research output: Contribution to journalJournal articleResearchpeer-review

The diagonal and off-diagonal AC conductivity of two-dimensional electron gases with contactless Corbino geometry in the quantum Hall regime

Petersen, C. L. & Hansen, O. P., 1996, In : Journal of Applied Physics. 80, 8, p. 4479-4483

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
316 Downloads (Pure)
1997

Cold-walled UHV/CVD batch reactor for the growth of Si1_x/Gex layers

Thomsen, E. V., Christensen, C., Andersen, C. R., Pedersen, E. V., Egginton, P. N., Hansen, O. & Petersen, J. W., 1997, In : Thin Solid Films. 294, 1-2, p. 72-75

Research output: Contribution to journalJournal articleResearchpeer-review

Fabrication of an all-metal atomic force microscope probe

Rasmussen, J. P., Tang, P. T., Hansen, O., Møller, P. & Sander, C., 1997, Proceedings of Transducers 97. Chicago: IEEE, Vol. 1. p. 463-466

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Open Access
File
389 Downloads (Pure)

Microdevices by Metal Plating

Hansen, O., Rasmussen, J. P. & Ravnkilde, J. T., 1997, MMC/MIC Seminar on Micromachines. Lyngby: MIC, p. 43-49

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

MICROMECHANICAL MICROPHONE

Bay, J., Bouwstra, S. & Hansen, O., 1997, Patent No. WO1997001258, 1 Sep 1997

Research output: Patent

New approaches to atomic force microscope lithography on silicon

Birkelund, K., Thomsen, E. V., Rasmussen, J. P., Hansen, O., Tang, P. T., Møller, P. & Grey, F., 1997, In : Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures. 15, 6, p. 2912-2915

Research output: Contribution to journalJournal articleResearchpeer-review

Organotypic slice cultures grown on silicon-based arrays of electrodes

Jahnsen, H. & Hansen, O., 1997, Society for Neuro-science, 27th Annual meeting. p. 20-20

Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

Quasistatic analysis of square dia-phragms and capacitive microphones using finite element calculation

Bay, J., Hansen, O. & Bouwstra, S., 1997, MME '97. p. 242-245

Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

Quasistatic analysis of square diaphragms and capacitive microphones using finite lelement calculation

Bay, J., Hansen, O. & Bouwstra, S., 1997, Proceedings MME'97. Southampton, p. 242-236

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Selvevaluering af elektro-civilingeniøruddannelsen ved DTU

Bruun, E. (ed.), Bruun, E., Galster, G., Hansen, O., Kirkegaard, J., Knudsen, B., Madsen, K., Nielsen, L. D., Smedsgaard, H., Sørensen, P. H. & Wätjen, R., 1997

Research output: Book/ReportReport

Spatial variation of the etch rate for deep etching of silicon by reactive ion etching

Andersen, B. A. M., Hansen, O. & Kristensen, M., 1997, In : Journal of Vacuum Science & Technology B. 15, 4, p. 993-999

Research output: Contribution to journalJournal articleResearchpeer-review

1998

Fabrication of submicron suspended structures by laser and AFM lithography on aluminium combined with reactive ion etching

Boisen, A., Birkelund, K., Hansen, O. & Grey, F., 1998, In : Journal of Vacuum Science & Technology B. 16, 6 Nov/Dec, p. 2977-2981

Research output: Contribution to journalJournal articleResearchpeer-review

Fabrication of submicron suspended structures by laser and AFM lithography on aluminum combined with reactive ion etching.

Boisen, A., Birkelund, K., Hansen, O. & Grey, F., 1998, In : Journal of Vacuum Science & Technology B. 16, 6, p. 2977-81

Research output: Contribution to journalJournal articleResearchpeer-review

Field-Induced Deformation as a Mechanism for Scanning Tunneling Microscopy Based Nanofabrication

Hansen, O., Ravnkilde, J. T., Quaade, U., Stokbro, K. & Grey, F., 1998, In : Physical Review Letters. 81, 25, p. 5572-5575

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
165 Downloads (Pure)

Novel AFM Probes - Fabrication and Characterization

Boisen, A., Hansen, O., Bouwstra, S. & Grey, F., 1998, Nanoscience for Nanotechnology. Hindsgavl: The European Communities

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

Novel AFM Probes - Fabrication and Characterization

Boisen, A., Hansen, O. & Bouwstra, S., 1998, Third Microstructure Workshop. Uppsala: Uppsala University

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Released Metallic Microstructures

Ravnkilde, J. T., Hansen, O. & Tang, P. T., 1998, Proceedings of The Ninth Micromechanics Europe Workshop,MME'98. Ulvik: IOP Publishing, p. 86-89

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Solid State Diffusion

Hansen, O., 1998, 23 p.

Research output: Book/ReportBook

The Bipolar Transistor

Hansen, O., 1998, 21 p.

Research output: Book/ReportBook

The Bipolar Transistor - Simple Theory

Hansen, O., 1998, 22 p.

Research output: Book/ReportBook

The MOS Capacitor

Hansen, O., 1998, 20 p.

Research output: Book/ReportBook

1999

AFM probe with piezoresistive read-out and highly symmetrical wheatstone bridge arrangement.

Thaysen, J., Boisen, A., Hansen, O. & Bouwstra, S., 1999, AFM probe with piezoresistive read-out and highly symmetrical wheatstone bridge arrangement.. The Institute of Electrical Engineers of Japan, p. 1852-1855

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Combined laser and atomic force microscope lithography on aluminum: Mask fabrication for nanoelectromechanical systems

Berini, A. G., Boisen, A., Davis, Z. J., Hansen, O. & Grey, F., 1999, In : Applied Physics Letters. 74, 21, p. 3206-3208

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
225 Downloads (Pure)

Electroplated Ni Comb accelerometers for CMOS post processing.

Johansen, L. S., Ravnkilde, J. T., Yalcinkaya, A. D. & Hansen, O., 1999, Electroplated Ni Comb accelerometers for CMOS post processing.. p. 409-410

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Fabrication of electroplated nickel micromechanical resonators.

Ravnkilde, J. T., Yalcinkaya, A. D., Johansen, L. S. & Hansen, O., 1999, Fabrication of electroplated nickel micromechanical resonators.. Academic Press

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

Gas sensor based on micromachined cantilevers with integrated read-out.

Jensenius, H., Thaysen, J., Rasmussen, A. A., Veje, L. H., Hansen, O. & Boisen, A., 1999, Gas sensor based on micromachined cantilevers with integrated read-out.. p. 586-587

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Laser and AFM lithography on aluminum: a toolbox for fabrication of nanoelectromechanical structures.

Boisen, A., Abadal, G., Davis, Z. J., Hansen, O. & Grey, F., 1999, Laser and AFM lithography on aluminum: a toolbox for fabrication of nanoelectromechanical structures.. p. 337-338

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Mechanical characterisation of electroplated nickel-iron.

Ravnkilde, J. T., Ziebart, V., Hansen, O. & Baltes, H., 1999, Mechanical characterisation of electroplated nickel-iron.. p. 191-192

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Micromachined double backplate differential capacitive microphone.

Bay, J., Hansen, O. & Bouwstra, S., 1999, In : Journal of Micromechanics and Microengineering. 9, 1, p. 30-33

Research output: Contribution to journalJournal articleResearchpeer-review

Noise in piezoresistive atomic force microscopy

Hansen, O. & Boisen, A., 1999, In : Nanotechnology. 10, 1, p. 51-60

Research output: Contribution to journalJournal articleResearchpeer-review

2000

AFM probe with piezorestive read-out and highly symmentrical Wheatstone bridge arrangement

Thaysen, J., Boisen, A., Hansen, O. & Bouwstra, S., 2000, In : Sensors and Actuators. 83, 83, p. 47-53

Research output: Contribution to journalJournal articleResearchpeer-review

A microcantilever-based alcohol vapor sensor-application and response model

Jensenius, H., Thaysen, J., Rasmussen, A. A., Veje, L. H., Hansen, O. & Boisen, A., 2000, In : Applied Physics Letters. 76, 18, p. 2615-2617

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File
239 Downloads (Pure)

Balanced Membrane Micromachined Loudspeaker for Hearing Instrument Application

Rehder, J., Rombach, P. & Hansen, O., 2000, MME’00. Uppsala, Finland

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Elecroplating and characterization of cobalt-nickel-iron for magnetic microsystems applications.

Rasmussen, F. E., Ravnkilde, J. T., Tang, P. T., Hansen, O. & Bouwstra, S., 2000, EuroSensors. Elsevier, 7 p.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Environmental sensors based on micromachined cantilevers with integrated read-out

Boisen, A., Thaysen, J., Jensenius, H. & Hansen, O., 2000, In : Ultramicroscopy. 82, 1-4, p. 11-16

Research output: Contribution to journalJournal articleResearchpeer-review

Fabrication and characterization of nano-resonating devices for mass detection

Davis, Z., Abadal, G., Kuhn, O., Hansen, O., Grey, F. & Boisen, A., 2000, In : Journal of Vacuum Science & Technology B. 18, 2, p. 612-612

Research output: Contribution to journalJournal articleResearchpeer-review

Fabrication of Microcomponents by Electrochemical Manufacturing: Advanced Feed-Through Metallisation on Silicon and Nickel Micromechanical Resonators

Tang, P. T., Heschel, M., Ravnkilde, J. T., Hansen, O., Møller, P. & Alting, L., 2000, 1st euspen topical conference on Fabrication and Metrology in Nanotechnology. IPL

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Low temperature anodic bonding to silicon nitride

Weichel, S., Reus, R. D., Bouaidat, S., Rasmussen, P., Hansen, O., Birkelund, K. & Dirac, P. A. H., 2000, In : Sensors and Actuators A: Physical. 82, 1-3, p. 249-253

Research output: Contribution to journalJournal articleResearchpeer-review

Mechanical characterisation of flexible silicon microstructures

Lisby, T., Nikles, S., Najafi, K., Hansen, O., Bouwstra, S. & Branebjerg, J., 2000, Proceedings of Euorosensors XIV. Copenhagen, Denmark, p. 157-158

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Mechanical characterization of Electroplated NiFe

Ravnkilde, J. T., Ziebart, V., Hansen, O. & Baltes, H., 2000, In : Sensors and Materials. 12, 2, p. 98-108

Research output: Contribution to journalJournal articleResearchpeer-review

Nanocantilever devices for mass detection - fabrication and characterization

Davis, Z. J., Abadal, G., Helbo, B., Hansen, O., Grey, F. & Boisen, A., 2000, Proceedings of 1st euspen topical conference on fabrication and metrology in nanotechnology. Copenhagen, Denmark, p. 81-89

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Solid state silicon based condenser microphone for hearing aid, has transducer chip and IC chip between intermediate chip and openings on both sides of intermediate chip, to allow sound towards diaphragm

Hansen, O., Heschel, M., Bouwstra, S., Müllenborn, M., Hvims, H., Rombach, P. & Gravad, M. A., 2000, Patent No. US6088463-A, 11 Jul 2000

Research output: Patent

2001

A SUBSTRATE AND A METHOD FOR DETERMINING AND/OR MONITORING ELECTROPHYSIOLOGICAL PROPERTIES OF ION CHANNELS

Petersen, J. W., Telleman, P., Hansen, O., Christophersen, P., Bech, M., Olesen, S. P., Due, J. & Thomsen, L., 2001, Patent No. WO2001025769, 12 Apr 2001

Research output: Patent

Balanced membrane micromachined loudspeaker for hearing instrument application

Rehder, J., Rombach, P. & Hansen, O., Jul 2001, In : Journal of Micromechanics and Microengineering. 11, 4, p. 334-338

Research output: Contribution to journalJournal articleResearchpeer-review

Electroplating and characterization of cobalt-nickel-iron and nickel-iron for magnetic microsystems applications

Rasmussen, F. E., Ravnkilde, J. T., Tang, P. T., Hansen, O. & Bouwstra, S., 2001, In : Sensors and Actuators A-physical. 92, 1-3, p. 242-248 7 p.

Research output: Contribution to journalJournal articleResearchpeer-review