Photo of Matthias Keil
  • Ørsteds Plads, Byg. 347, 347, 080

    2800 Lyngby

    Denmark

20142018

Research output per year

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Research Output

  • 2 Conference abstract in proceedings
  • 1 Journal article

Inductively coupled plasma nanoetching of atomic layer deposition alumina

Han, A., Chang, B., Todeschini, M., Le, H. T., Tiddi, W. & Keil, M., 2018, In : Microelectronic Engineering. 193, p. 28-33

Research output: Contribution to journalJournal articleResearchpeer-review

Open Access
File

Deep-UV-Lithography: Principles, Optimization, and Simulation

Keil, M., Møller, N. P., Khomtchenko, E. & Johansen, L. S., 2015, Book of Abstracts. DTU's Sustain Conference 2015. Lyngby: Technical University of Denmark, 1 p. P-9

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

Open Access
File

Pattern Definition with DUV-Lithography at DTU Danchip

Keil, M., Khomtchenko, E., Nyholt, H., Gregersen, A. & Johansen, L., 2014, Abstract Book - DTU Sustain Conference 2014. Kgs. Lyngby: Technical University of Denmark, 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review