Photo of Leif Steen Johansen

Leif Steen Johansen

  • Ørsteds Plads, Byg. 347, 347, 170

    2800 Lyngby

    Denmark

19942016

Research output per year

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Research Output

Energy Saving on Cleanroom Fume Hoods

Jørgensen, A. M., Eriksen, J. V., Becker, M., Winther Allerup, M. & Johansen, L., 2016. 1 p.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Open Access

Quality control of JEOL JBX-9500FSZ e-beam lithography system in a multi-user laboratory

Greibe, T., Anhøj, T. A., Johansen, L. & Han, A., 2016, In : Microelectronic Engineering. 155, p. 25-28 4 p.

Research output: Contribution to journalJournal articleResearchpeer-review

Deep-UV-Lithography: Principles, Optimization, and Simulation

Keil, M., Møller, N. P., Khomtchenko, E. & Johansen, L. S., 2015, Book of Abstracts. DTU's Sustain Conference 2015. Lyngby: Technical University of Denmark, 1 p. P-9

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

Open Access
File
159 Downloads (Pure)

Quality Control of JEOL JBX-9500 E-beam Lithography System in a Multi-User Laboratory

Greibe, T., Anhøj, T. A., Han, A. & Johansen, L., 2015. 1 p.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Open Access
File
313 Downloads (Pure)
Open Access
File
380 Downloads (Pure)

Projects

Add-on Metallic Microstructures for CMOS

Hansen, O., Rasmussen, J. P., Johansen, L. S., Ravnkilde, J. T., Møller, P. & Tang, P. T.

01/02/1996 → …

Project: Research

SOI-CMOS Process

Hansen, O., Johansen, L. S. & Ravnkilde, J. T.

01/09/1994 → …

Project: Research

AFM probes

Bouwstra, S., Boisen, A., Hansen, O., Johansen, L. S., Ginnerup, M. & Thaysen, J.

Unknown

01/04/1994 → …

Project: Research

High temperature solder for MEMS packaging

Bergmann, R., Hansen, H. N., Johansen, L. S., Tang, P. T., Hansen, O., Heschel, M., Leisner, P. & Møller, P.

ErhvervsPhD-ordningen VTU

01/02/200602/09/2009

Project: PhD

Mikroelektronik til mikrosystemer

Johansen, L. S., Gravesen, P. & Hansen, O.

Centerfinansieret

01/08/199517/07/2000

Project: PhD

Activities

  • 1 Conference presentations

An Arduino-Based Hardware Lockand Sensor Data Collection System for Cleanroom Equipment

Leif Johansen (Lecturer)

17 Jun 2014

Activity: Talks and presentationsConference presentations

File