Keyphrases
Row-column
100%
Capacitive Micromachined Ultrasonic Transducer
57%
Row-column Arrays
57%
Ultrasonic Transducer Arrays
42%
Quartz Substrate
28%
High-resolution Ultrasound
28%
Micromachined Ultrasound Transducers
28%
Silicide
28%
Resonant Frequency
28%
Wafer Level
28%
Functional Imaging
28%
Anodic Bonding
28%
Anatomic Imaging
28%
Polysilicon
28%
Bottom Electrode
23%
Top Electrode
23%
Wafer Bonding
21%
Wafer
21%
Silicon Nitride Layer
14%
Pull-in Voltage
14%
Synthetic Aperture
14%
Element pitch
14%
Bonding Interface
14%
Bond Yields
14%
Coupling Coefficient
14%
SOI Wafer
14%
Glass Wafer
14%
Isotropic Resolution
14%
DC Bias
14%
Borosilicate Glass
14%
Fabrication Methods
14%
Electrical Measurements
14%
Silica
14%
High-voltage Operation
14%
Velocity Profile
11%
Measurement Methodology
9%
Process Yield
9%
Capacitance
9%
Electrical Characterization
9%
Current-voltage Measurements
9%
Electron Bunch Length
9%
Cathode Rays
9%
Electron Damage
9%
Electron Bursts
9%
Blood Tissue
7%
Lensing
7%
High-resolution
7%
Device Layer
7%
3D Velocity
7%
Insulating Substrate
7%
Engineering
Transducer
100%
Synthetic Aperture
57%
Capacitive
50%
Ultrasonics
50%
Linear Array
42%
Velocity Profile
28%
Resonance Frequency
28%
Point Spread Function
19%
Super-Resolution Imaging
17%
Hydrogel
17%
Graphics Processing Unit
14%
Diffraction Limit
14%
Wafer Bonding
14%
Motion Estimation
14%
Borosilicate Glass
14%
Pull-in Voltage
14%
Coupling Coefficient
14%
Theoretical Value
14%
Imaging Depth
14%
Delay-and-Sum Beamforming
14%
Nitride Layer
14%
Peak Velocity
14%
Electrical Measurement
14%
Velocity Vector
14%
Beamforming
14%
Review Paper
14%
High Resolution
14%
Tracking Algorithm
14%
Spatial Position
14%
Side Lobe
14%
Process Yield
9%
Electrical Level
9%
Mode Image
9%
Defects
6%
Physics
Transducer
42%
Synthetic Aperture
28%
Erythrocyte
28%
Beamforming
28%
Theoretical Model
28%
Electron Emission
28%
Metasurface
28%
Ultrasonics
22%
Field Emission
19%
Super-Resolution Imaging
17%
High Resolution
14%
Escape Velocity
14%
Transverse Oscillation
14%
Tracking Algorithm
14%
Field of View
14%
Velocity Vector
14%
Transients
9%
Physics
9%
Electric Fields
9%
Electromagnetic Radiation
9%