Karen Birkelund

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Karen Birkelund

Photo Lithography, Wet Chemistry

 https://orcid.org/0000-0003-4413-8434

  • Ørsteds Plads, 345B, 046

    2800 Kgs. Lyngby

    Denmark

  • 24 Journal article
  • 13 Article in proceedings
  • 1 Conference abstract in proceedings
  • 1 Conference abstract for conference
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  • 2017

    A method for manufacturing a hollow mems structure

    Han, A. (Inventor), Thanh, H. L. (Inventor), Birkelund, K. (Inventor), Jørgensen, A. M. (Inventor) & Jensen,, F. (Inventor), 29 Jun 2017, IPC No. H01F 17/ 00 A I, Patent No. WO2017108218, 29 Jun 2017, Priority date 23 Dec 2015, Priority No. EP20150202490

    Research output: Patent

    Open Access
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    387 Downloads (Pure)