Jörg Hübner

2025

Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity

Kota, S. V., Thilsted, A., Trimarco, D., Pan, J. Y., Hansen, O., Hübner, J., Taboryski, R. & Jansen, H., 2025, In: Micromachines. 16, 1, 17 p., 104.

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

1 Downloads (Pure)

2021

Cr and CrO_xetching using SF₆and O₂plasma

Hoang Nguyen, V. T., Jensen, F., Hübner, J., Shkondin, E., Cork, R., Ma, K., Leussink, P., De Malsche, W. & Jansen, H., 2021, In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 39, 3, 14 p., 032201.

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

680 Downloads (Pure)

Fabrication of microstructured surface topologies for the promotion of marine bacteria biofilm

Droumpali, A., Hübner, J., Gram, L. & Taboryski, R., 2021, In: Micromachines. 12, 8, 10 p., 926.

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

104 Downloads (Pure)

2020

On the formation of black silicon in SF₆-O₂ plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand

Nguyen, V. T. H., Jensen, F., Hübner, J., Leussink, P. & Jansen, H., 2020, In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 38, 4, 9 p., 043004.

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

735 Downloads (Pure)

The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF₆/O₂ Cycles with Excellent 3D Profile Control at Room Temperature

Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J., Ma, K., Leussink, P., de Boer, M. & Jansen, H., 2020, In: ECS Journal of Solid State Science and Technology. 9, 2, 14 p., 024002.

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

740 Downloads (Pure)

Ultrahigh aspect ratio etching of silicon in SF₆-O₂plasma: The clear-oxidize-remove-etch (CORE) sequence and chromium mask

Nguyen, V. T. H., Shkondin, E., Jensen, F., Hübner, J., Leussink, P. & Jansen, H., 2020, In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 38, 5, 12 p., 053002.

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

1142 Downloads (Pure)

2019

Highly Ordered 3D Silicon Micro-Mesh Structures Integrated with Nanowire Arrays: A Multifunctional Platform for Photodegradation, Photocurrent Generation, and Materials Conversion

Chang, B., Tang, Y., Liang, M., Jansen, H., Jensen, F., Wang, B., Mølhave, K., Hübner, J. & Sun, H., 2019, In: ChemNanoMat. 5, 1, p. 92-100 10 p.

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

311 Downloads (Pure)

Large Area Three-Dimensional Photonic Crystal Membranes: Single-Run Fabrication and Applications with Embedded Planar Defects

Chang, B., Zhou, C., Tarekegne, A. T., Yang, Y., Zhao, D., Jensen, F., Hübner, J. & Jansen, H., 2019, In: Advanced Optical Materials. 7, 2, 9 p., 1801176.

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

238 Downloads (Pure)

2018

DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process

Chang, B., Leussink, P., Jensen, F., Hübner, J. & Jansen, H., 2018, In: Microelectronic Engineering. 191, p. 77-83

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

1485 Downloads (Pure)

DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro- and nanostructures by a modified Bosch etch process

Chang, B., Jensen, F., Hübner, J. & Jansen, H., 2018, In: Journal of Micromechanics and Microengineering. 28, 10, 10 p., 105012.

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

491 Downloads (Pure)

In-depth evolution of chemical states and sub-10-nm-resolution crystal orientation mapping of nanograins in Ti(5 nm)/Au(20 nm)/Cr(3 nm) tri-layer thin films

Zhu, X., Todeschini, M., Bastos da Silva Fanta, A., Liu, L., Jensen, F., Hübner, J., Jansen, H., Han, A., Shi, P., Ming, A. & Xie, C., 2018, In: Applied Surface Science. 453, p. 365-372

Research output: Contribution to journal › Journal article › Research › peer-review

2015

Injection molded polymeric hard X-ray lenses

Stöhr, F., Simons, H., Jakobsen, A. C., Nielsen, C. H., Michael-Lindhard, J., Jensen, F., Poulsen, H. F., Hansen, O. & Hübner, J., 2015, In: Optical Materials Express. 5, 12, p. 2804-2811

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

712 Downloads (Pure)

Optimizing shape uniformity and increasing structure heights of deep reactive ion etched silicon x-ray lenses: Paper

Stöhr, F., Wright, J., Simons, H., Michael-Lindhard, J., Hübner, J., Jensen, F., Hansen, O. & Poulsen, H. F., 2015, In: Journal of Micromechanics and Microengineering. 25, 12, 10 p., 125013.

Research output: Contribution to journal › Journal article › Research › peer-review

1 Downloads (Pure)

Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon x-ray lenses

Stöhr, F., Michael-Lindhard, J., Hübner, J., Jensen, F., Simons, H., Jakobsen, A. C., Poulsen, H. F. & Hansen, O., 2015, In: Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures. 33, 6, 10 p., 062001.

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

1285 Downloads (Pure)

Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy

Stöhr, F., Michael-Lindhard, J., Simons, H., Poulsen, H. F., Hübner, J., Hansen, O., Garnæs, J. & Jensen, F., 2015, In: Microelectronic Engineering. 141, p. 6-11

Research output: Contribution to journal › Journal article › Research › peer-review

1 Downloads (Pure)

2013

Separation followed by direct SERS detection of explosives on a novel black silicon multifunctional nanostructured surface prepared in a microfluidic channel

Talian, I. & Hübner, J., 2013, In: Journal of Raman Spectroscopy. 44, 4, p. 536-539

Research output: Contribution to journal › Journal article › Research › peer-review

2012

Nanopillars: Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy (Adv. Mater. 10/2012)

Schmidt, M. S., Hübner, J. & Boisen, A., 2012, In: Advanced Materials. 24, 10

Research output: Contribution to journal › Journal article › Research › peer-review

2011

Large area fabrication of leaning silicon nanopillars for surface enhanced raman spectroscopy

Schmidt, M. S., Hübner, J. & Boisen, A., 2011, In: Advanced Materials. 24, p. OP11-OP18

Research output: Contribution to journal › Journal article › Research › peer-review

2010

Detection of biologically active diterpenoic acids by Raman Spectroscopy

Talian, I., Orinak, A., Efremov, E. V., Ariese, F., Kaniansky, D., Orinakova, R. & Hübner, J., 2010, In: Journal of Raman Spectroscopy. 41, 9, p. 964-968

Research output: Contribution to journal › Journal article › Research › peer-review

2009

Surface-enhanced Raman spectroscopy on novel black silicon-based nanostructured surfaces

Talian, I., Mogensen, K. B., Orinak, A., Kaniansky, D. & Hübner, J., 2009, In: Journal of Raman Spectroscopy. 40, 8, p. 982-986

Research output: Contribution to journal › Journal article › Research › peer-review

2008

A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

Nordström, M., Calleja, M., Hübner, J. & Boisen, A., 2008, In: Journal of Micromechanics and Microengineering. 18, 1

Research output: Contribution to journal › Journal article › Research › peer-review

2007

Integrated optical readout for miniaturization of cantilever-based sensor system

Nordström, M., Zauner, D., Calleja, M., Hübner, J. & Boisen, A., 2007, In: Applied Physics Letters. 91, 10, p. 103512

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

563 Downloads (Pure)

Single-mode waveguides with SU-8 polymer core and cladding for MOEMS applications

Nordström, M., Zauner, D., Boisen, A. & Hübner, J., 2007, In: Journal of Lightwave Technology. 25, 5, p. 1284-1289

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

2820 Downloads (Pure)

2006

Concave reflective SU-8 photoresist gratings for flat-field integrated spectrometers

Zauner, D., Jørgensen, A. M., Anhøj, T. A. & Hübner, J., 2006, In: Applied Optics. 45, 23, p. 5877-5880

Research output: Contribution to journal › Journal article › Research › peer-review

Sloped side walls in SU-8 structures with 'Step-and-Flash' processing

Nordström, M., Hübner, J. & Boisen, A., 2006, In: Microelectronic Engineering. 83, 4-9, p. 1269-1272

Research output: Contribution to journal › Journal article › Research › peer-review

The effect of soft bake temperature on the polymerization of SU-8 photoresist

Anhøj, T. A., Jørgensen, A. M., Zauner, D. & Hübner, J., 2006, In: Journal of Micromechanics and Microengineering. 16, 9, p. 1819

Research output: Contribution to journal › Journal article › Research › peer-review

2005

High-density multi-mode Integrated Polymer Optics

Zauner, D., Jørgensen, A. M., Anhøj, T. A. & Hübner, J., 2005, In: Journal of Optics A: Pure and Applied Optics (Print). 7, 9, p. 445-450

Research output: Contribution to journal › Journal article › Research › peer-review

2003

Advances in silica-based integrated optics

Poulsen, M. R., Borel, P. I., Fage-Pedersen, J., Hübner, J., Kristensen, M., Povlsen, J. H., Rottwitt, K., Svalgaard, M. & Svendsen, W. E., 2003, In: Optical Engineering. 42, 10, p. 2821-2834

Research output: Contribution to journal › Journal article › Research › peer-review

Measurement of optical nonlinearity in silicon rich nitride waveguide ring resonators

Philipp, H. T., Svendsen, W. E., Andersen, K. N., Hübner, J. & Povlsen, J. H., 2003, In: Electronics Letters. 39, 16, p. 1184-1185

Research output: Contribution to journal › Journal article › Research › peer-review

2002

Polarization control method for UV writing of advanced Bragg gratings

Jensen, J. B. D., Plougmann, N., Deyerl, H.-J., Varming, P., Hübner, J. & Kristensen, M., 2002, In: Optics Letters. 27, 12, p. 1004-1006

Research output: Contribution to journal › Journal article › Research › peer-review

2001

Integrated optical measurement system for fluorescence spectroscopy in microfluidic channels

Hübner, J., Mogensen, K. B., Jørgensen, A. M., Friis, P., Telleman, P. & Kutter, J. P., 2001, In: Review of Scientific Instruments. 72, 1, p. 229-233

Research output: Contribution to journal › Journal article › Research › peer-review

Open Access

File

1042 Downloads (Pure)

Monolithic integration of microfluidic channels and optical waveguides in silica on silicon

Friis, P., Hoppe, K., Leistiko, O., Mogensen, K. B., Hübner, J. & Kutter, J. P., 2001, In: Applied Optics. 40, 34, p. 6246-6251

Research output: Contribution to journal › Journal article › Research › peer-review

Monolithic integration of optical waveguides for absorbance detection in microfabricated electrophoresis devices

Mogensen, K. B., Petersen, N. J., Hübner, J. & Kutter, J. P., 2001, In: Electrophoresis. 22, 18, p. 3930-3938

Research output: Contribution to journal › Journal article › Research › peer-review

Planar Er- and Yb-doped amplifiers and lasers

Hübner, J., Guldberg-Kjær, S. A., Dyndgaard, M. G., Shen, Y., Thomsen, C. L., Balslev, S., Jensen, C., Zauner, D. A. & Feuchter, T., 2001, In: Applied Physics B. 73, 5-6, p. 435-438

Research output: Contribution to journal › Journal article › Research › peer-review

Silica-on-silicon waveguide fabrication

Haiyan, O. & Hübner, J., 2001, In: DOPS-Nyt. 16, 2, p. 39-42

Research output: Contribution to journal › Journal article › Research › peer-review

Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems

Mogensen, K. B., Friis, P., Hübner, J., Petersen, N. J., Jørgensen, A. M., Telleman, P. & Kutter, J. P., 2001, In: Optics Letters. 26, 10, p. 716-718

Research output: Contribution to journal › Journal article › Research › peer-review

1999

Planar waveguide laser in Er/Al-doped germanosilicate

Guldberg-Kjær, S. A., Hübner, J., Kristensen, M., Laurent-Lund, C., Poulsen, M. R. & Sckerl, M. W., 1999, In: Electronics Letters. 35, 4, p. 302-303

Research output: Contribution to journal › Journal article › Research › peer-review

1998

Polarisation Control of DFB Fibre Laser Using UV-Induced Birefringent Phase-Shift

Philipsen, J. L., Lauridsen, V. C., Berendt, M. O., Varming, P., Povlsen, J. H., Hübner, J., Kristensen, M. & Palsdottir, B., 1998, In: Electronics Letters. 34, 7, p. 678-679

Research output: Contribution to journal › Journal article › Research › peer-review

Strong sampled bragg gratings for WDM applications

Hübner, J., Zauner, D. & Kristensen, M., 1998, In: I E E E Photonics Technology Letters. 10, 4, p. 552-554

Research output: Contribution to journal › Journal article › Research › peer-review

1997

Five Wavelength DFB Fibre Laser Source for WDM Systems

Hübner, J., Varming, P. & Kristensen, M., 1997, In: Electronics Letters. 33, 2, p. 139-140

Research output: Contribution to journal › Journal article › Research › peer-review

Jörg Hübner

Publications

Search results