Jörg Hübner

Search results

• 2018

  Three dimensional engineering of silicon micro- and nanostructures

  Chang, B., Jensen, F., Hübner, J. & Jansen, H., 2018.

  Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

  Open Access

  File
  175 Downloads (Pure)
• 2017

  Infinite Etching Selectivity with Conventional Photoresist in a Bosch Process

  Chang, B., Leussink, P., Jensen, F., Hübner, J. & Jansen, H., 2017.

  Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

  Open Access

  File
  775 Downloads (Pure)

• RIE-lag “Correction” in Bosch Etch Process of Silicon to Enable Profile Straightness and Improved Scallop Size Distribution

  Chang, B., Leussink, P., Jensen, F., Hübner, J. & Jansen, H., 2017.

  Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

  Open Access

  File
  262 Downloads (Pure)
• 2015

  Polymer injection molding of hard X-ray refractive optics

  Stöhr, F., Michael-Lindhard, J., Simons, H., Jakobsen, A. C., Hübner, J., Jensen, F., Hansen, O. & Poulsen, H. F., 2015. 1 p.

  Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

  Open Access

  File
  234 Downloads (Pure)
• 2013

  Manufacturing and Characterization of Silicon Compound Refractive Lenses for Focussing of Hard X-Rays

  Stöhr, F., Michael-Lindhard, J., Simons, H., Hübner, J., Jensen, F., Hansen, O., Snigirev, A. & Poulsen, H. F., 2013. 1 p.

  Research output: Contribution to conference › Conference abstract for conference › Research

  File
  166 Downloads (Pure)
• 2008

  Innovation Strategy and IP Management at DTU Nanotech

  Poulsen, M. R., Hübner, J., Ørum, M. & Berg, R. H., 2008.

  Research output: Contribution to conference › Conference abstract for conference › Research › peer-review