Engineering
Waveguide
36%
Fibre Laser
24%
Side Wall
21%
High Aspect Ratio
21%
Directional
21%
Nanostructured Surface
18%
Microfluidic Channel
18%
Fiber Grating
18%
Deep Reactive Ion Etching
16%
Microstructure
14%
Aspect Ratio
13%
Nanoscale
13%
Raman Effect
12%
Focal Length
10%
Photon Energy
10%
Etch Rate
9%
Optical Fiber
9%
Cleanroom
9%
Phase Shift
9%
Silicon Wafer
8%
Using Sensor
7%
Directionality
7%
Room Temperature
7%
Fabrication Technique
7%
Microsystem
7%
Nanofabrication Process
6%
Measurement System
6%
Atomic Force Microscopy
6%
Optical Communication System
6%
Bragg Cell
6%
Profile Control
6%
Nanometrology
6%
Monolithic Integration
6%
Optical Frequency
6%
Hard X-Rays
6%
Nano System
6%
Electrophoretic Technology
6%
Microelectromechanical System
6%
Complete System
6%
Integrated Circuit
6%
Shape Analysis
6%
Ray Diffraction
6%
Micro Machining
6%
Laser Micro
6%
Sensing Performance
6%
Amplifier
6%
Limiting Factor
6%
Optical Testing
6%
Defects
6%
Output Facet
6%
Material Science
Silicon
100%
Waveguide
42%
Surface-Enhanced Raman Spectroscopy
36%
Reactive Ion Etching
34%
Silicon Dioxide
16%
Silicon Wafer
12%
Chromium
12%
Linewidth
10%
Oxidation Reaction
10%
Lithography
9%
Microfabrication
8%
Thin Films
8%
Nanocrystalline Material
7%
Chemical State
6%
Fiber Laser
6%
Biofilms
6%
Crystal Orientation
6%
Oxynitride
6%
Nanowires
6%
Photonic Crystal
6%
Electronic Circuit
6%
Microelectromechanical System
6%
Fiber Optics
6%
Theoretical Calculation
6%
Surface Defect
6%
Nanodevices
6%
Laser Source
6%
Machining
6%
Silicon Compound
6%
Functional Material
6%
Zinc Oxide
6%
Keyphrases
Distributed Feedback (DFB) Laser
12%
X-ray Lens
12%
Long-period Fiber Grating
12%
UV-induced
8%
Coupled Resonance
7%
WDM System
6%
Optical Readout
6%
SERS Substrate
6%
Al-doped
6%
Optical Communication Systems
6%
Silicon Nanopillars
6%
Detection Cell
6%
Absorbance Detection
6%
Electrophoresis
6%
Absorption Detection
6%
Monolithic Integration
6%
Silica-on-silicon
6%
Silicon-based
6%
Long Period Grating
6%
Polarization Control
6%
Bosch DRIE
6%
Nanostructured Surfaces
6%
DRIE Process
6%
Signal Enhancement
6%
Integrating Amplifier
6%
Waveguide Integration
6%
Kinoform
6%
SERS Detection
6%
DFB Fiber Laser
6%
Power Output
6%
Analytical Signal
6%
Laser Source
6%
Germanosilicate
6%
Black Silicon
6%
Cantilever Sensor
6%
MEMS Strain Sensor
6%
Dimensional Nanometrology
6%
Waveguide
6%
Hard X-ray
6%
Surface-enhanced Raman Spectroscopy
6%
Etched Silicon
6%
Polymeric Core
6%
Polymeric Cantilever
6%
Planar Waveguide Laser
6%
Polarization Properties
6%
Novel Fabrication Techniques
6%
Surface-enhanced Raman Scattering Substrate
6%
Bending Sensor
6%
Single-mode Waveguide
6%
Electro-optic Effect
6%
