19952020

Research output per year

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Research Output

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Conference abstract for conference

Infinite Etching Selectivity with Conventional Photoresist in a Bosch Process

Chang, B., Leussink, P., Jensen, F., Hübner, J. & Jansen, H., 2017.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Open Access
File
179 Downloads (Pure)

Innovation Strategy and IP Management at DTU Nanotech

Poulsen, M. R., Hübner, J., Ørum, M. & Berg, R. H., 2008.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Manufacturing and Characterization of Silicon Compound Refractive Lenses for Focussing of Hard X-Rays

Stöhr, F., Michael-Lindhard, J., Simons, H., Hübner, J., Jensen, F., Hansen, O., Snigirev, A. & Poulsen, H. F., 2013. 1 p.

Research output: Contribution to conferenceConference abstract for conferenceResearch

File
120 Downloads (Pure)

Polymer injection molding of hard X-ray refractive optics

Stöhr, F., Michael-Lindhard, J., Simons, H., Jakobsen, A. C., Hübner, J., Jensen, F., Hansen, O. & Poulsen, H. F., 2015. 1 p.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Open Access
File
159 Downloads (Pure)

RIE-lag “Correction” in Bosch Etch Process of Silicon to Enable Profile Straightness and Improved Scallop Size Distribution

Chang, B., Leussink, P., Jensen, F., Hübner, J. & Jansen, H., 2017.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Open Access
File
72 Downloads (Pure)

Three dimensional engineering of silicon micro- and nanostructures

Chang, B., Jensen, F., Hübner, J. & Jansen, H., 2018.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Open Access
File
96 Downloads (Pure)