Engineering
Directional
24%
High Aspect Ratio
22%
Aspect Ratio
21%
Nanometre
21%
Photonics
19%
Dielectrics
17%
Nanoscale
17%
Etch Rate
15%
Diffraction Limit
14%
Microstructure
13%
Directionality
12%
Room Temperature
12%
High Resolution
12%
Nanofabrication Process
10%
Side Wall
10%
Atomic Force Microscope
9%
Hard Chromium
9%
Profile Control
9%
Nitride
9%
Defects
9%
Transmissions
9%
Elevated Temperature
9%
Photoresist
9%
Scanning Electron Microscope
9%
Discretization
9%
Quality Factor
9%
Electron Optical Lithography
9%
Thin Films
7%
Smallest Feature
7%
Critical Dimension
7%
Process Step
5%
Material Science
Silicon
100%
Reactive Ion Etching
34%
Chromium
29%
Nanocrystalline Material
21%
Thin Films
19%
Dielectric Material
17%
Lithography
16%
Density
14%
Scanning Electron Microscopy
14%
Photonic Crystal
13%
Linewidth
13%
Oxidation Reaction
13%
Zinc Oxide
11%
Chemical State
9%
Crystal Orientation
9%
Nanowires
9%
Microfabrication
9%
Waveguide
9%
Functional Material
9%
Crystal Structure
5%
Keyphrases
Propagation Loss
9%
SF6/O2
9%
Deep Reactive Ion Etching
9%
Nanophotonic Cavities
9%
Dose-dense
9%
Filling Effect
9%
Sacrificial Structures
9%
2D Array
9%
Photon Confinement
9%
Photonic Topological Insulators
9%
Bosch DRIE
9%
DRIE Process
9%
Tri-layer Thin Films
9%
Confined Growth
9%
Tunable Structural Color
9%
ZIF-8 Nanocrystals
9%
Plasma Mixture
9%
Edge Modes
9%
Mesh Structure
9%
Grass
9%
Waveguide
6%
