Flemming Jensen

Head of Process Engineering, Ph.D., Assoc. Prof., National Centre for Nano Fabrication and Characterization

Phone20811667
Emailflje@dtu.dk
Websitehttp://www.danchip.dtu.dk, http://www.nanolab.dtu.dk/

Ørsteds Plads , 347, 076
2800 Kgs. Lyngby
Denmark

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39 Journal article
19 Conference abstract for conference
7 Article in proceedings
6 Poster
More
- 5 Conference abstract in proceedings
- 3 Paper

Fabrication of hollow coaxial Al₂O₃/ZnAl₂O₄ high aspect ratio freestanding nanotubes based on the Kirkendall effect
Shkondin, E., Alimadadi, H., Takayama, O., Jensen, F. & Lavrinenko, A. V., 1 Jan 2020, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 38, 1, 9 p., 013402.
Research output: Contribution to journal › Journal article › Research › peer-review

Open Access
File
92 Downloads (Pure)
On the formation of black silicon in SF₆-O₂ plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand
Nguyen, V. T. H., Jensen, F., Hübner, J., Leussink, P. & Jansen, H., 2020, In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 38, 4, 9 p., 043004.
Research output: Contribution to journal › Journal article › Research › peer-review
The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF₆/O₂ Cycles with Excellent 3D Profile Control at Room Temperature
Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J., Ma, K., Leussink, P., de Boer, M. & Jansen, H., 2020, In: ECS Journal of Solid State Science and Technology. 9, 2, 14 p., 024002.
Research output: Contribution to journal › Journal article › Research › peer-review
Ultrahigh aspect ratio etching of silicon in SF₆-O₂plasma: The clear-oxidize-remove-etch (CORE) sequence and chromium mask
Nguyen, V. T. H., Shkondin, E., Jensen, F., Hübner, J., Leussink, P. & Jansen, H., 2020, In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 38, 5, 12 p., 053002.
Research output: Contribution to journal › Journal article › Research › peer-review
3D Silicon Micro- and Nanostructures for Photonic Devices and Applications
Chang, B., Jensen, F., Jansen, H. & Hübner, J., 2019.
Research output: Contribution to conference › Poster › Research › peer-review

Open Access
File

72 Downloads (Pure)

22 Finished

Smoothed advanced silicon NEMS devices
Nguyen, V. T. H., Jansen, H., Hübner, J., Jensen, F., Stamate, E., Dussart, R. & Summanwar, A.
Technical University of Denmark
01/12/2017 → 03/03/2021
Project: PhD
Fabrication and Magnetic characterization of layered structures by means of election holography
Hyllested, J. Æ., Jensen, F., Wagner, J. B., Beleggia, M., Mølhave, K. S., Hÿtch, M. & Thelander, K. D.
Technical University of Denmark
01/12/2016 → 04/11/2020
Project: PhD
Fabrication and characterization of novel nanophotonic structures with electrical control
Marchevsky, A., Yvind, K., Mørk, J., Jensen, F., Birkedal, D. & van der Tol, J.
Samfinansierede - Virksomhed
01/10/2016 → 12/08/2020
Project: PhD
Technology Development for Sillicon NEMS devices
Chang, B., Jensen, F., Hübner, J., Jansen, H. V., Hansen, O., Tas, N. & Franssila, S. A.
Technical University of Denmark
01/11/2015 → 14/01/2019
Project: PhD
A new type of white light-emitting diode using flourescent silicon carbide
Lin, L., Ou, H., Jensen, F., Frandsen, L. H., Kamiyama, S., Liu, H. & Herstrøm, B.
Samfinansieret - Andet
01/09/2015 → 23/01/2019
Project: PhD