Research output per year
Research output per year
Personal profile
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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Research output
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Cr and CrOxetching using SF6and O2plasma
Hoang Nguyen, V. T., Jensen, F., Hübner, J., Shkondin, E., Cork, R., Ma, K., Leussink, P., De Malsche, W. & Jansen, H., 2021, In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 39, 3, 14 p., 032201.Research output: Contribution to journal › Journal article › Research › peer-review
Open AccessFile10 Downloads (Pure) -
Fabrication of hollow coaxial Al2O3/ZnAl2O4 high aspect ratio freestanding nanotubes based on the Kirkendall effect
Shkondin, E., Alimadadi, H., Takayama, O., Jensen, F. & Lavrinenko, A. V., 1 Jan 2020, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 38, 1, 9 p., 013402.Research output: Contribution to journal › Journal article › Research › peer-review
Open AccessFile204 Downloads (Pure) -
On the formation of black silicon in SF6-O2 plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand
Nguyen, V. T. H., Jensen, F., Hübner, J., Leussink, P. & Jansen, H., 2020, In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 38, 4, 9 p., 043004.Research output: Contribution to journal › Journal article › Research › peer-review
Open AccessFile129 Downloads (Pure) -
The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O2 Cycles with Excellent 3D Profile Control at Room Temperature
Nguyen, V. T. H., Silvestre, C., Shi, P., Cork, R., Jensen, F., Hubner, J., Ma, K., Leussink, P., de Boer, M. & Jansen, H., 2020, In: ECS Journal of Solid State Science and Technology. 9, 2, 14 p., 024002.Research output: Contribution to journal › Journal article › Research › peer-review
Open AccessFile152 Downloads (Pure) -
Ultrahigh aspect ratio etching of silicon in SF6-O2 plasma: The clear-oxidize-remove-etch (CORE) sequence and chromium mask
Nguyen, V. T. H., Shkondin, E., Jensen, F., Hübner, J., Leussink, P. & Jansen, H., 2020, In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 38, 5, 12 p., 053002.Research output: Contribution to journal › Journal article › Research › peer-review
Open AccessFile82 Downloads (Pure)
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Metal oxide thin films for optoelectronic applications
Llorens Balada, E., Stamate, E. & Jensen, F.
01/10/2021 → 30/09/2024
Project: PhD
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New light sources based on the nonlinearities of silicon carbide
Shi, X., Ou, H., Petersen, P. M., Rottwitt, K., Jensen, F., Frandsen, L. H. & Wellmann, P.
01/12/2018 → 08/04/2022
Project: PhD
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Smoothed advanced silicon NEMS devices
Nguyen, V. T. H., Jansen, H., Hübner, J., Jensen, F., Stamate, E., Dussart, R. & Summanwar, A.
Technical University of Denmark
01/12/2017 → 03/03/2021
Project: PhD
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Fabrication and Magnetic characterization of layered structures by means of election holography
Hyllested, J. Æ., Jensen, F., Wagner, J. B., Beleggia, M., Mølhave, K. S., Hÿtch, M. & Thelander, K. D.
Technical University of Denmark
01/12/2016 → 04/11/2020
Project: PhD
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Fabrication and characterization of novel nanophotonic structures with electrical control
Marchevsky, A., Yvind, K., Mork, J., Jensen, F., Birkedal, D. & van der Tol, J.
01/10/2016 → 12/08/2020
Project: PhD