1992 …2022

Research output per year

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Research Output

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Conference article
2014

Status and challenges in electrical diagnostics of processing plasmas

Stamate, E., 2014, In : Surface and Coatings Technology. 260, p. 401-410 10 p.

Research output: Contribution to journalConference articleResearchpeer-review

2007

Controlling the ion flux on substrates of different geometry by sheath-lens focusing effect

Stamate, E. & Sugai, H., 2007, In : Thin Solid Films. 515, p. 4853-4859

Research output: Contribution to journalConference articleResearchpeer-review

Investigation of the ion dose non-uniformity caused by sheath-lens focusing effect on silicon wafers

Holtzer, N., Stamate, E., Toyoda, H. & Sugai, H., 2007, In : Thin Solid Films. 515, p. 4887-4891

Research output: Contribution to journalConference articleResearchpeer-review

Open Access
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199 Downloads (Pure)

Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2

Nakao, S., Stamate, E. & Sugai, H., 2007, In : Thin Solid Films. 515, 12, p. 4869-4873

Research output: Contribution to journalConference articleResearchpeer-review