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  • 2020

    On-resonance self-organization of nanostructures

    Zhu, X. (Inventor) & Kristensen, A. (Inventor), 17 Dec 2020, IPC No. G03F 7/ 00 A I, Patent No. WO2020249176, 11 Jun 2020, Priority date 11 Jun 2019, Priority No. EP20190179464

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