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Dive into the research topics where Lithography is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.
Collaborations and top research areas from the last five years
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Profiles
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Thomas Aarøe Anhøj
- National Centre for Nano Fabrication and Characterization - Process Specialist, Ph.D.
- Photo Lithography, Wet Chemistry
- Lithography
Person: VIP
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Karen Birkelund
- National Centre for Nano Fabrication and Characterization - Head of lithography and wet chemistry, Ph.D.
- Photo Lithography, Wet Chemistry
- Wetchemistry
- Lithography
Person: VIP
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Force Sensors Based on Optomechanical Cavities Made from Silicon Nanopillars
Navarro-Urrios, D., Poblet, M., Alonso-Tomas, D., Lopez-Aymerich, E., Bertelsen, C. V., Singh, R., Hernandez, S., Dimaki, M., Svendsen, W. E., Jaramillo-Fernandez, J., Moreno-Sereno, M. & Romano-Rodriguez, A., 2026, Proceedings of 2025 IEEE SENSORS. IEEE, 4 p. (Proceedings of IEEE Sensors).Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review
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High-resolution hexagonal array patterns fabricated by dipole cross-exposure in deep ultraviolet lithography
Dhankhar, M., Keil, M., Khomtchenko, E., Pret, A. V. & Birkelund, K., 2025, In: Journal of Micro/Nanopatterning, Materials and Metrology. 24, 1, 13 p., 014801.Research output: Contribution to journal › Journal article › Research › peer-review
Open AccessFile37 Downloads (Orbit) -
Fabrication and characterization of plasmonic nanopillars on a membrane for TEM investigation
Serra Gonzalez, M., Keil, M., Deshpande, R. A., Kadkhodazadeh, S. & Taboryski, R., 2024. 2 p.Research output: Contribution to conference › Conference abstract for conference › Research › peer-review